Rolling-Ball Tilt Stage for Stable EUV Target Trajectory
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Solution Overview
Problem
Existing EUV light generation systems face challenges in maintaining the trajectory of targets due to adherence and deviation issues, which are not effectively addressed by conventional tilt stages that cannot withstand the load and suffer from friction-related problems.
Innovation Solution
A tilt stage design using first and second tilt support portions with rolling balls and adjusters to adjust the posture of the target supply device, allowing for tilting without significant friction and space increase, supported by a rotation support portion for stable mounting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional tilt stages are used to adjust target supply device posture, then posture adjustment is possible, but the stage cannot withstand the load and suffers from friction-related problems
Solution Approach 1:
The tilt stage is divided into multiple independent support portions (first tilt support portion, second tilt support portion, third tilt support portion), each with its own ball contact mechanism. This segmentation allows the load to be distributed across multiple points while maintaining simple individual components, resolving the contradiction between load bearing capability and structural simplicity.
Solution Approach 2:
The invention uses spherical balls as the contact elements between the mounting table and support structures. The spherical geometry enables rolling motion with minimal friction while distributing contact forces evenly across the ball surface, thereby achieving both high load bearing capability and low friction operation without increasing structural complexity.
2Manufacturing precision
If tilt support structures are added to adjust target trajectory, then trajectory accuracy improves, but device complexity and space requirements increase
Solution Approach 1:
The tilt support portions enable posture adjustment in angular dimensions (tilt angles) rather than requiring linear displacement in space. By converting positional adjustment problems into angular orientation problems, the system achieves precise trajectory control without occupying additional linear space, thus improving target trajectory accuracy while minimizing device footprint.
3Reliability
If friction is reduced in the tilt mechanism, then target supply direction stability improves, but the mechanism complexity increases
Solution Approach 1:
The invention replaces sliding friction mechanisms with rolling friction mechanisms by introducing spherical balls that roll on contact surfaces. This substitution dramatically reduces friction coefficients while maintaining mechanical simplicity, as rolling contact requires no complex lubrication systems or precision sliding surfaces, thereby improving target supply direction stability without increasing mechanism complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tilt stage effectively reduces target trajectory deviations and maintains target supply direction, enhancing the reliability and efficiency of EUV light generation by minimizing friction and maintaining structural integrity under load.
Implementation Method 1
moving one of the first ball and the first contact surface in a first direction that is different from both a direction perpendicular to the first contact surface and a direction parallel to the first contact surface so that the first ball rolls on the first contact surface
Implementation Method 2
moving one of the second ball and the second contact surface in a second direction that different is from both a direction perpendicular to the second contact surface and a direction parallel to the second contact surface so that the second ball rolls on the second contact surface
Data Source
AI summary
A tilt stage includes a mounting table on which a target supply device supplying a target to a predetermined region in a chamber is mounted, a rotation support portion supporting the mounting table rotatably about at least first and second axes, a first tilt support portion including a first ball and a first contact surface in contact with the first ball and supporting the mounting table, a first adjuster adjusting posture of the target supply device by moving one of the first ball and the first contact surface in a first direction, a second tilt support portion including a second ball and a second contact surface in contact with the first ball and supporting the mounting table, and a second adjuster adjusting the posture of the target supply device by moving one of the second ball and the second contact surface in a second direction.