Rotary Cathode End Block With Conical Contact for High Current Transfer
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Solution Overview
Problem
Existing rotating magnetron sputtering cathodes face challenges with small transmission currents due to complex structures and limited contact areas, which also lead to wear and damage from carbon powder, affecting dynamic sealing and insulation.
Innovation Solution
A rotary cathode end block with a conductive drive shaft and a non-rotating electrical contact featuring a conical surface and hole, respectively, to enhance electrical contact area and reliability, integrated with a spring for maintaining contact and a cooling water system for heat dissipation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If carbon brush is used for dynamic rotation transmission, then the structure can achieve dynamic rotation, but the electric contact area is small and cannot transmit larger current
Solution Approach 1:
The patent employs a conical contact surface instead of a flat or point contact. The cone-shaped electrical contact interface between the stationary electrical contact and the rotating drive shaft increases the contact area from a point or line to a conical surface area, enabling larger current transmission while maintaining rotational capability
Solution Approach 2:
The patent transitions from a traditional linear or point contact arrangement to a three-dimensional conical contact surface. This dimensional expansion of the contact interface allows for increased current capacity by distributing the electrical load across a larger surface area in multiple spatial dimensions
2Ease of operation
If carbon brush is used for dynamic rotation transmission, then the structure can achieve dynamic rotation, but carbon powder generated by wear will be damaged to the dynamic sealing and insulation
Solution Approach 1:
The patent extracts and eliminates the carbon brush component entirely from the system. By replacing it with a metal-to-metal conical contact interface between the drive shaft and electrical contact, the source of carbon powder generation is removed, preventing contamination of the dynamic sealing and insulation components
Solution Approach 2:
The patent employs metal materials for both the drive shaft and electrical contact components, creating a metal-to-metal contact system. This material substitution eliminates the carbon-based material that generates harmful powder, while maintaining the necessary electrical conductivity and mechanical properties for dynamic rotation
3Power
If electrical contact area is increased, then current transmission capability is improved, but the contact pressure and wear may increase
Solution Approach 1:
The conical geometry of the contact surface distributes the contact pressure across a graduated area, with the pressure naturally varying from the apex to the base of the cone. This curved surface configuration optimizes the pressure distribution to maintain durability while enabling high current transmission
Solution Approach 2:
The patent changes the contact geometry parameters from flat or point contact to a conical surface with specific angle and dimensions. By optimizing the cone angle and surface area parameters, the system achieves high current capacity while controlling contact pressure within acceptable limits to prevent excessive wear
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables larger current transmission and more reliable power transmission, while minimizing wear and maintaining effective dynamic sealing and insulation, thus supporting long-term stable operation of high-power vacuum coating equipment.
Implementation Method 1
A spring between the electrical contact and the central support is set on the connection shaft a force is provided through the spring to maintain close contact between the electrical contact and the drive shaft
Implementation Method 2
The electrical contact is in contact with the drive shaft, and the contact surface between which is cone-shaped
Implementation Method 3
A first channel communicated with the circumferential gap is arranged on the drive shaft
Implementation Method 4
one of the water joints is communicated with the circumferential gap
Data Source
AI summary
A rotary cathode end block in this application comprises an end case body. A conductive drive shaft is rotatably installed in the end case body through a bearing, and one end of the drive shaft penetrates from the end case body and is fixedly connected with a target installation flange. A conductive central support is fixedly connected to the end case body. The central support is integrally formed with a connection shaft. One end of the connection shaft coaxially passes through the drive shaft and the target installation flange. A non-rotating electrical contact is set on the connection shaft. The central support is electrically connected with the electrical contact. The electrical contact is in contact with the drive shaft, and the contact surface between which is cone-shaped. The advantages of this application are larger transmission power and more reliable structure.