Rotary Electrical Feedthrough for Vacuum Chuck Rotation

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Solution Overview

Problem

Existing semiconductor processing tools face challenges in maintaining high vacuum conditions and accommodating rotational motion while providing necessary electrical and gas utilities, limiting the uniformity of deposited films during processes like PVD.

Innovation Solution

The implementation of rotary electrical feedthroughs with magnetic couplers enables contactless rotation and efficient RF return paths, maintaining high vacuum conditions by isolating conductive components and using insulating bearings, and providing multiple electrical paths through a rotary electrical feedthrough.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a rotational component is added to the semiconductor processing tool to improve thickness uniformity, then the thickness uniformity of deposited films is improved, but maintaining high vacuum conditions becomes difficult

Engineering Contradiction:

Improvethickness uniformityVSAvoidvacuum condition

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The patent replaces traditional mechanical drive systems with a magnetic coupling system. The magnetic coupler uses magnetic fields to transmit rotational force without physical contact between moving parts, eliminating mechanical seals that would compromise vacuum integrity. This allows the chuck to rotate while maintaining high vacuum conditions (1e-9 Torr or lower) in the processing chamber.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The magnetic coupler acts as an intermediary between the vacuum chamber and the external drive mechanism. It transfers rotational motion from the external motor to the internal chuck through magnetic field interaction without requiring direct mechanical connection or penetration of the vacuum barrier, thus maintaining vacuum isolation while enabling rotation.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Adaptability or versatility

If electrical inputs are provided to the rotating chuck, then the chuck can be rotated and electrical utilities can be maintained, but the complexity of the system increases

Engineering Contradiction:

Improveelectrical connectivityVSAvoidsystem complexity

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces traditional sliding contact electrical connections with a rotary electrical feedthrough system. This feedthrough uses a rotating sealed interface that maintains electrical connectivity while allowing rotation, eliminating the need for complex brushes or slip rings and reducing overall system complexity.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The rotary electrical feedthrough integrates multiple functions: it provides electrical connectivity, maintains vacuum sealing, and accommodates rotation all through a single integrated component. This multi-functional design reduces the number of separate components needed and simplifies the overall system architecture.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If traditional chucking architectures are used with electrical inputs, then electrical utilities can be provided, but the vacuum conditions cannot be maintained at high levels

Engineering Contradiction:

Improveelectrical utility provisionVSAvoidvacuum level

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The patent replaces traditional mechanical electrical connection methods (such as sliding contacts or rotary joints with seals) with a magnetically coupled system combined with a rotary feedthrough. This eliminates the need for penetrating seals that would allow vacuum leakage, enabling high vacuum levels (1e-9 Torr or lower) to be maintained while still providing electrical utilities to the rotating chuck.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution allows for improved thickness uniformity of deposited films by enabling rotation within high vacuum environments while maintaining efficient electrical connectivity and RF control, enhancing the performance of semiconductor processing tools.

Implementation Method 1

a magnetic coupler to enable contactless rotation. In an embodiment, the magnetic coupler comprises a tube, a bushing around the tube, a housing outside of the bushing, a first set of magnets between the tube and the bushing, a second set of magnets between the bushing and the housing

Methodology Applied

Scientific EffectMagnetic coupling: Electromagnetic Induction

Implementation Method 2

first bearings between the tube and the bushing, wherein the first bearings are electrically insulating

Methodology Applied

Scientific EffectElectrical insulation: Dielectric

Data Source

PatentUS20240018646A1Rotary electrical feedthrough integration for process chamber

Publication Date: 2024.01.18 APPLIED MATERIALS INC

AI summary

Embodiments disclosed herein include semiconductor processing tools. In an embodiment, the semiconductor processing tool comprises a chamber, a chuck within the chamber, where the chuck is configured to rotate, a pedestal holder around the chuck, and a utility column coupled to the chuck. In an embodiment, the utility column comprises a magnetic coupler to enable rotation of portions of the utility column and the chuck, and a rotary electrical feedthrough.