Rotary-Linear Substrate Transfer Mechanism for Compact Semiconductor Processing
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Solution Overview
Problem
Conventional substrate transfer devices are limited to transferring substrates only over fixed distances, making them incapable of reaching multiple locations at different distances, which results in larger apparatus sizes and reduced efficiency in semiconductor device manufacturing.
Innovation Solution
A substrate processing apparatus with a transfer device featuring a rotary-linear motion mechanism, including a base that rotates and two moving units with independent drive mechanisms, allowing for the transfer of substrates between multiple locations at varying distances, thereby reducing apparatus size and improving throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a conventional substrate transfer device is used, then the device structure is simple, but the device can only transfer substrates over fixed distances and cannot reach multiple locations at different distances
Solution Approach 1:
The transfer device is divided into two independent moving units: a first moving unit that moves linearly on the base, and a second moving unit that moves linearly on the first moving unit. Each unit has its own drive mechanism (first drive unit with first motor and pulley group, second drive unit with second motor), allowing independent control of transfer distances to different locations
Solution Approach 2:
The transfer device transitions from a fixed-distance mechanism to a dynamic, multi-position system. The base can rotate by a third motor, the first moving unit moves linearly on the base, and the second moving unit moves linearly on the first moving unit, enabling the transfer arm to reach multiple locations at different distances through coordinated motion of all three units
2Adaptability or versatility
If the transfer device is designed to reach multiple locations, then the transfer versatility is improved, but the apparatus size increases
Solution Approach 1:
The second moving unit is positioned on the first moving unit, creating a nested configuration where one moving mechanism is placed within or upon another. This nested arrangement allows the transfer device to achieve extended reach for multiple locations while minimizing the horizontal footprint of the apparatus
Solution Approach 2:
The transfer device utilizes three-dimensional space by combining rotational motion of the base with linear motion of two nested moving units. This multi-dimensional approach allows the system to reach multiple locations at different distances without proportionally increasing the apparatus footprint, as the extended reach is achieved through vertical stacking and coordinated motion rather than horizontal expansion
3Productivity
If independent control of motion units is implemented, then the transfer precision and throughput are improved, but the control complexity increases
Solution Approach 1:
The control system is segmented into three independent control units, each managing one motor (first motor for the first pulley group, second motor for the second pulley group, third motor for base rotation). This segmentation allows each motor to be controlled independently, enabling precise positioning at multiple locations and facilitating optimized transfer sequences that improve throughput
Solution Approach 2:
The controller is designed to universally control all three motors and coordinate the three moving units to achieve various transfer positions and sequences. This multi-functional control capability allows the system to handle different transfer scenarios (different distances, different locations) using a single integrated control system, improving productivity without proportionally increasing control complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient transfer of substrates between different locations, reducing the size of the processing apparatus and enhancing transfer velocity and throughput by allowing independent control of the motion units.
Implementation Method 1
a first pulley group; a first belt wound on the first pulley group, a first motor coupled to and configured to drive a first pulley of the first pulley group
Implementation Method 2
a second pulley group; a second belt wound on the second pulley group, a second motor coupled to and configured to drive a second pulley of the second pulley group
Implementation Method 3
a base capable of rotation by a third motor
Data Source
AI summary
A substrate processing apparatus includes a process chamber and a transfer device configured to transfer a plurality of substrates to a substrate retainer. The transfer device includes a base; a first moving unit capable of linear motion; a first drive unit to drive the first moving unit. The first drive unit includes a first pulley group; a first motor coupled to a first pulley; and a first connecting member coupling the first belt and the first moving unit. A second moving unit is capable of linear motion. A second drive unit is in an enclosure of the first moving unit and drives the second moving unit. The second drive unit includes a second pulley group; a second belt wound on the second pulley group, a second motor coupled to drive a second pulley; and a second connecting member coupling the second belt and the second moving unit.