Rotary Valve Unit for Alternating Heat Transfer Media Supply
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Solution Overview
Problem
Existing substrate processing apparatuses require multiple valve units to alternately supply heat transfer media of different temperatures, leading to increased size and complexity, as well as reduced operating speed and durability due to the high-speed operations of these valve units.
Innovation Solution
A supply system with a reduced number of valve units that alternately supplies a first and second heat transfer medium to zones of a stage, utilizing a shaft body with supply grooves and a driving unit to rotate and connect/disconnect inlet and outlet ports, allowing efficient switching between media supply and return paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple valve units (two three-way valves and two opening/closing valves per zone) are used to alternately supply heat transfer media, then the substrate temperature control capability is improved, but the apparatus size and complexity increase
Solution Approach 1:
The patent combines multiple valve units into a single integrated valve unit that can perform the functions of two three-way valves and two opening/closing valves. The valve unit includes a common inlet for both heat transfer media, multiple outlets for different zones, and a single moving member with grooves that directs different media to different zones, thereby reducing the total number of valve units from four per zone to one per zone.
Solution Approach 2:
The valve unit is designed as a multi-functional component that can simultaneously control the supply of multiple different heat transfer media to multiple different zones. The single valve unit performs the functions of selecting, switching, and distributing media, replacing multiple specialized valve units with one universal valve unit that handles all control functions.
2Manufacturing precision
If multiple valve units are used to alternately supply heat transfer media, then the temperature control precision is improved, but the operating speed and durability decrease due to high-speed operations of multiple valves
Solution Approach 1:
By merging multiple high-speed operating valve units into a single valve unit, the patent reduces the total number of moving parts that require high-speed operation. The single valve unit handles all switching and selection functions, thereby improving overall system reliability and reducing the cumulative wear and failure risk associated with multiple high-speed valves.
3Temperature
If four valve units per zone are used to alternately supply heat transfer media, then the temperature control capability is achieved, but the apparatus size increases
Solution Approach 1:
The patent merges four separate valve units into one compact valve unit per zone, significantly reducing the space required for valve assemblies. The integrated design with a common inlet, shared moving member, and multiple outlets creates a compact structure that maintains full temperature control capability while occupying minimal space in the apparatus.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system reduces the size and complexity of the apparatus while enhancing the durability and operating speed of valve units, enabling efficient temperature control of substrates by alternately supplying heat transfer media.
Implementation Method 1
a shaft body and a driving unit, the shaft body having a first supply groove and a second supply groove which extend along a circumferential direction around a central axis of the shaft body; the first supply groove connecting the first inlet to the first outlet when a rotation angle about a central axis of the shaft body is within a first angle range and the second supply groove connecting the second inlet to the second outlet when the rotation angle about the central axis of the shaft body is within a second angle range
Data Source
AI summary
A heat transfer medium supply system includes valve units each alternately supplying a first and a second heat transfer medium to a corresponding zone of a stage. The valve unit includes a housing and a shaft. The housing has first and second inlets, and first and second outlets. The first and second inlets are respectively connected to a first and a second medium temperature controller. The first and second outlets are connected to the corresponding zone. The shaft is inserted in the housing and has first and second supply grooves. The first supply groove connects the first inlet to the first outlet when a rotation angle about a central axis of the shaft is within a first angle range, and the second supply groove connects the second inlet to the second outlet when the rotation angle about the central axis of the shaft is within a second angle range.