Rotatable Brush Coating Removal Apparatus
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Solution Overview
Problem
Current methods for removing coatings from panels in the semiconductor industry, such as laser ablation and solvent-based fluid streams, are inefficient, pose safety concerns, and risk damaging fragile panels, especially when dealing with thin panels and difficult-to-remove coatings like copper or titanium.
Innovation Solution
An apparatus utilizing multiple pairs of rotatable brushes that rotate and move towards and away from the panel, engaging with the coating and contacting a liquid to mechanically and chemically remove the coating, with fluid-cooled cold plates and vacuum systems to manage fumes and debris.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If laser ablation is used to remove coatings, then coating removal capability is improved, but debris generation and safety risks increase
Solution Approach 1:
The patent replaces the laser-based mechanical/thermal ablation system with a fluid jet system that uses pressurized liquid to mechanically impact and remove coatings. This substitution eliminates the harmful effects of laser ablation including debris generation, fire hazards, and the need for expensive ventilation systems, while maintaining effective coating removal capability through controlled fluid impact.
Solution Approach 2:
The invention employs a hydraulics-based fluid jet system where pressurized liquid is delivered through a nozzle to remove coatings. This hydraulic approach provides controlled, debris-free coating removal without the safety risks associated with laser systems, and eliminates the need for complex ventilation infrastructure while improving both safety and productivity.
2Productivity
If traditional laser methods are used on thin panels, then coating removal is achieved, but panel breakage risk increases
Solution Approach 1:
The patent changes the fundamental parameter of coating removal from high-energy thermal/laser ablation to low-energy fluid impact. By using pressurized liquid jets instead of high-power lasers, the system achieves effective coating removal while applying minimal stress to thin panels, thereby maintaining panel integrity and eliminating breakage risks associated with traditional laser methods.
3Productivity
If solvent-based fluid streams are used for coating removal, then coating removal capability is improved, but safety concerns and waste collection challenges increase
Solution Approach 1:
The invention changes the chemical parameter of the fluid from flammable organic solvents to water-based or non-flammable liquids. This parameter change maintains coating removal capability through fluid impact while eliminating fire hazards and simplifying waste collection and disposal, thereby improving safety without sacrificing productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively removes coatings with reduced debris, safety risks, and panel damage, while being more efficient and cost-effective compared to traditional methods, and can handle a variety of coating types on different substrates.
Implementation Method 1
first portions of the two opposing brushes may separably engage with and rotate on opposite surfaces of the coated panel
Implementation Method 2
second portions of the two opposing brushes may at least contact the liquid in the one or more liquid tanks
Implementation Method 3
a pair of fluid cooled cold plates spaced apart from each in the second direction to define a gap therebetween
Data Source
AI summary
A coating removal apparatus includes multiple pairs of rotatable brushes spaced apart from each other in a first direction. Each pair of brushes may include two opposing brushes that are configured to rotate about a common axis and move towards and away from each other in a second direction transverse to the first direction. When a coated panel is positioned between the two opposing brushes, first portions of the brushes may separably engage with and rotate on opposite surfaces of the coated panel. The apparatus may also include one or more liquid tanks configured to contain a liquid. When the tanks contain the liquid and when the coated panel is positioned between the two opposing brushes, second portions of the two brushes may at least contact the liquid in the liquid tanks.