Rotatable Disk Electron Beam Chamber for Compact Vacuum Sealing
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Solution Overview
Problem
Existing electron beam processing devices have limitations in compactness and precision due to the need for large carriage systems that extend beyond the horizontal dimensions of the chamber housing, which complicates the movement of the electron beam generator and affects sealing during vacuum or reduced pressure operations.
Innovation Solution
A compact electron beam processing device design featuring a rotatable disk with a slot-shaped opening, allowing the electron beam generator to move within the horizontal dimensions of the chamber housing, and a carriage system that includes a support with parallel projections for precise guidance, enabling the electron beam to reach any point within the chamber plane without deflection, while maintaining a sealed environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a traditional carriage system is used to move the electron beam generator, then the electron beam can be positioned accurately, but the device becomes large and extends beyond the chamber housing dimensions
Solution Approach 1:
The patent implements a nested structure where the carriage system is integrated within the chamber housing. The carriage moves along guides that are contained within the chamber, and the electron beam generator is mounted on the carriage in a space-efficient manner. This nesting approach allows the entire movement mechanism to fit within the chamber's horizontal dimensions while maintaining positioning precision.
Solution Approach 2:
The patent utilizes vertical space within the chamber to accommodate the carriage system. Instead of extending the carriage horizontally beyond the chamber, the system moves the electron beam generator vertically and radially within the available three-dimensional space of the chamber, thereby achieving repositioning without increasing the chamber's horizontal footprint.
2Area of stationary object
If the carriage system is reduced in size to fit within chamber dimensions, then compactness is improved, but sealing during vacuum operations becomes more difficult
Solution Approach 1:
The patent employs flexible sealing elements such as bellows or expandable membranes at the interface between the carriage and the chamber wall. These flexible structures can accommodate the movement of the carriage while maintaining the vacuum seal, allowing the compact carriage system to move without compromising sealing reliability during vacuum operations.
Solution Approach 2:
The sealing system is divided into multiple segments or zones, with separate sealing mechanisms for different parts of the carriage-chamber interface. This segmentation allows each sealing element to be optimized for its specific location and movement characteristics, improving overall sealing effectiveness while maintaining compact dimensions.
3Adaptability or versatility
If the electron beam generator is moved outside the chamber for repositioning, then movement freedom is improved, but the sealed environment is compromised
Solution Approach 1:
The patent implements a dynamic sealing system where the carriage and its sealing elements are designed to move together as an integrated unit within the chamber. The carriage carries its own sealing interface that maintains contact with the chamber wall during movement, allowing the electron beam generator to be repositioned freely while the sealing system dynamically adapts to maintain the vacuum environment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves a more compact and precise electron beam processing system that maintains a sealed environment during operation, allowing for efficient movement of the electron beam within the chamber without exceeding the chamber's horizontal dimensions, thereby enhancing the overall processing efficiency and sealing capabilities.
Implementation Method 1
An electron beam generator (42) adapted to generate an electron beam (45) along an electron beam axis (45)
Data Source
AI summary
An electron beam processing device includes a chamber housing that defines a chamber interior space and has a first opening. A carriage is movable along the first opening. An electron beam generator is disposed on the carriage so that the generated electron beam passes through the first opening when the carriage moves along the first opening. A disk is disposed between the chamber housing and the carriage and is rotatable about a rotational axis, which is perpendicular to the first opening, at least between a first rotational position and a second rotational position. The disk has a second opening spaced from the rotational axis of the disk in the radial direction. The rotational axis of the disk is disposed so that the first opening always overlaps the second opening at least along an electron beam propagation axis when the disk rotates between the first and second rotational positions.