Rotatable MEMS Diffraction Grating for Planar Waveguide Integration

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Solution Overview

Problem

Existing microoptoelectromechanical systems (MOEMS) and optical microelectromechanical systems (MEMS) based designs for wavelength tunable components, such as sources, filters, and detectors, primarily rely on free space optics, which limits their integration and efficiency in planar waveguide domains, necessitating the development of MOEMS elements that support tunable operations within this domain.

Innovation Solution

The implementation of a photonic circuit with a rotatable microelectromechanical systems (R-MEMS) element featuring a planar waveguide and a diffraction grating, allowing optical signals within a predetermined wavelength range to be coupled back to a channel waveguide through rotation, enabling tunable operations without free space optics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If free space optics are used for wavelength tunable components, then optical functionality is achieved, but integration and efficiency in planar waveguide domains are limited

Engineering Contradiction:
Improveintegration capabilityVSAvoidsystem complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent replaces free space optical systems with planar waveguide-based MOEMS structures. The R-MEMS element with integrated diffraction grating and mirror substitutes traditional mechanical free-space optics, enabling wavelength tuning through planar integration rather than bulky free-space components.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The invention transitions from three-dimensional free space optics to two-dimensional planar waveguide integration. The R-MEMS element operates within the planar domain, rotating to couple different wavelengths between waveguides without requiring vertical or spatial separation characteristic of free-space systems.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If multiple discrete components are used, then optical functions are implemented, but footprint and power consumption increase

Engineering Contradiction:
ImprovefootprintVSAvoidoptical signal management efficiency
Core Design Contradiction:
Area of stationary objectVSProductivity

Solution Approach 1:

The patent combines multiple discrete optical components into a single integrated R-MEMS structure. The diffraction grating, mirror, and rotation mechanism are merged into one element that can be directly coupled to planar waveguides, eliminating the need for separate components and reducing overall footprint.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The R-MEMS element serves multiple functions simultaneously: it acts as a wavelength selector through rotation, a coupler between waveguides, and an integrated optical component with diffraction grating and mirror. This multi-functionality replaces what would traditionally require multiple discrete devices.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Use of energy by moving object

If free space optics are employed, then wavelength tuning is achieved, but power consumption increases

Engineering Contradiction:
Improvepower consumptionVSAvoidwavelength tuning capability
Core Design Contradiction:
Use of energy by moving objectVSEase of operation

Solution Approach 1:

The patent replaces power-intensive free space optical systems with a planar-integrated R-MEMS structure that uses minimal power for rotation. The electrostatic or piezoelectric actuation of the R-MEMS element consumes significantly less power than traditional free-space optical switching and tuning mechanisms.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

By operating in the planar waveguide domain rather than free space, the system eliminates power consumption associated with maintaining free-space optical paths, lenses, and alignment mechanisms. The two-dimensional integration reduces the energy required for wavelength tuning operations.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient and tunable optical signal management within the planar waveguide domain, enhancing integration, flexibility, and reducing power consumption, while supporting continuous wavelength tuning and discrete wavelength selection for advanced optical networking applications.

Implementation Method 1

having a diffraction grating formed therein

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 2

having a mirror formed therein

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS10816792B2Wavelength tunable optical sources, filters and detectors
Publication Date: 2020.10.27 VALORBEC PARTNERSHIP
  • US10816792B2 patent drawing
  • US10816792B2 patent drawing
  • US10816792B2 patent drawing

AI summary

Wavelength division multiplexing (WDM) has enabled telecommunication service providers to fully exploit the transmission capacity of optical fibers. State of the art systems in long-haul networks now have aggregated capacities of terabits per second. Moreover, by providing multiple independent multi-gigabit channels, WDM technologies offer service providers with a straight forward way to build networks and expand networks to support multiple clients with different requirements. In order to reduce costs, enhance network flexibility, reduce spares, and provide re-configurability many service providers have migrated away from fixed wavelength transmitters, receivers, and transceivers, to wavelength tunable transmitters, receivers, and transceivers as well as wavelength dependent add-drop multiplexer, space switches etc. However, to meet the competing demands for improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, re-configurability, and lower cost it is desirable to exploit/adopt monolithic optical circuit technologies, hybrid optoelectronic integration, and microelectromechanical systems (MEMS).