Rotatable Probe Chip Geometry for High-Aspect-Ratio Mapping
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Solution Overview
Problem
Conventional scanning probe microscopy devices, particularly atomic force microscopes, struggle to accurately map nanostructures with high aspect ratios due to limitations in probe design, which prevent precise measurement of deep and narrow structures.
Innovation Solution
A probe chip design with a truncated carrier element allowing for rotation around a longitudinal axis, enabling the probe to adjust its angle relative to the substrate surface, combined with a mounting arrangement that facilitates this rotation without compromising mechanical stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional probe design is used, then the device can measure shallow surface structures, but it cannot accurately map deep and narrow high aspect ratio structures
Solution Approach 1:
The probe chip is designed with a truncated carrier element that enables rotational movement around the longitudinal axis. This dynamic capability allows the probe tip to be oriented at different angles relative to the substrate surface, enabling accurate measurement of high aspect ratio structures by adjusting the probe's angular position to match the sidewall angle of the features being measured.
2Adaptability or versatility
If the carrier element is truncated to enable probe rotation, then the probe can adjust its angle for high aspect ratio structures, but the mechanical stability of the probe chip may be compromised
Solution Approach 1:
The carrier element is truncated in a specific pattern that segments the structure strategically. This segmentation removes material only where necessary to enable rotation, while preserving the structural integrity and mechanical stability of the remaining carrier element body, thus balancing rotational capability with structural strength.
Solution Approach 2:
The truncation creates an asymmetric carrier element geometry that is optimized for rotational movement. The asymmetric design allows the probe chip to rotate smoothly around the longitudinal axis while maintaining adequate mechanical support, achieving a balance between adaptability and stability through non-symmetric material distribution.
3Measurement precision
If the probe tip contacts the substrate at a fixed angle, then the mounting is simple, but the probe cannot maintain contact with sidewalls of high aspect ratio structures
Solution Approach 1:
The probe chip incorporates a rotational degree of freedom that allows dynamic adjustment of the probe tip angle. This enables the probe to maintain contact with sidewalls of high aspect ratio structures by rotating to match the sidewall angle, improving measurement precision without requiring complex active control mechanisms.
Solution Approach 2:
The truncated carrier element design allows the probe chip to self-adjust its orientation through simple rotational movement. The geometry itself provides the mechanism for angle adjustment, eliminating the need for complex external positioning or active control systems while maintaining the ability to contact sidewalls effectively.
Data Source
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AI summary
The present document relates to a probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon. The probe chip includes a carrier element having a probe bearing side which is configured for bearing the probe to be extending therefrom as an integral or mounted part thereof. The carrier element further comprises a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device, wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat. The carrier element towards the probe bearing side thereof is truncated in the lateral direction on either side of a longitudinal axis through a center of the carrier element, such as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.