Rotatable Substrate Holder Assembly for Ion Implanters

The substrate holder is divided into multiple independent holders (first substrate holder, second substrate holder, etc.) that can operate independently. Each holder can hold and process substrates separately, allowing parallel processing operations. This segmentation enables multiple substrates to be implanted simultaneously or in rapid succession without waiting for loading/unloading cycles, thereby increasing productivity while maintaining manageable device complexity through modular design.

Multiple substrate holders are integrated into a single ion beam path, allowing them to share the same ion source and processing environment. The holders are positioned such that they can alternately occupy the ion beam path, with one holder being processed while another is loaded or unloaded. This merging of multiple holders into a shared processing space enables continuous operation without idle time, resolving the contradiction between productivity and device complexity.

Instead of moving the substrate radially outward from a central axis (traditional radial scanning), the invention inverts the approach by having the ion beam scan linearly across the substrate surface while the substrate remains in a fixed position or moves minimally. This inversion eliminates the variable scan speed problem inherent in radial scanning, as linear scanning at constant velocity ensures uniform dose distribution. The complexity is reduced by eliminating the need for complex radial positioning mechanisms while achieving the same scanning objective.

The invention replaces the mechanical radial scanning system with an electromagnetic beam deflection system. Instead of mechanically moving the substrate along a radial path with varying speed, the ion beam is deflected using electromagnetic fields to scan across the substrate surface. This substitution allows for precise control of beam position and scanning velocity, ensuring uniform dose characteristics while reducing mechanical complexity. The electromagnetic control enables accurate dosing without the speed variations inherent in mechanical radial motion.