Rotating Optical Element for DUV Lithography Damage Mitigation
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Solution Overview
Problem
Optical elements in deep ultraviolet (DUV) light sources suffer from significant damage due to the high power and short wavelength of the light beams used in semiconductor lithography, leading to reduced operational lifespan and efficiency.
Innovation Solution
An apparatus that includes an optical system with a rotating optical element, an alignment system, and an actuator to adjust the interaction region of the optical element with the light beam, allowing the beam to interact with different regions of the element without altering its modification behavior, thereby reducing damage and extending the element's lifespan.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If the optical element interacts with the high power DUV light beam, then the light beam modification is achieved, but the optical element suffers from significant damage and reduced operational lifespan
Solution Approach 1:
The optical element is divided into multiple interaction regions (first region and second region) that can be selectively engaged with the light beam. By segmenting the interaction area and rotating between regions, the patent distributes the high power light beam exposure across different portions of the optical element, preventing localized damage accumulation and extending overall operational lifespan.
2Device complexity
If the optical element is stationary, then the alignment and interaction setup is simple, but the optical element accumulates damage at the same location and its lifespan is reduced
Solution Approach 1:
The optical element is made rotatable about an axis, transforming it from a stationary component to a dynamic one. This rotation allows the light beam to interact with different regions (first and second regions) of the optical element over time, distributing damage accumulation and extending lifespan, while the alignment system maintains proper beam interaction throughout the rotation.
3Ease of operation
If the light beam interacts with a single region of the optical element, then the interaction setup is simple, but the damage concentrates on one area reducing the element's usable lifetime
Solution Approach 1:
The optical element rotates periodically, causing the light beam to alternately interact with the first region and the second region. This periodic switching between interaction regions distributes the cumulative damage effect over time and space, effectively doubling the usable lifetime of the optical element while maintaining operational simplicity through automated rotation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively doubles the usable lifetime of optical elements by distributing the interaction with the light beam across multiple regions, maintaining the beam's modification characteristics and reducing damage to the optical element and substrate.
Implementation Method 1
The light beam travels along the axial direction... The light beam interacts with the optical element... and the outputted light beam is directed along the second beam direction
Data Source
AI summary
An apparatus reduces optical damage on an optical element that interacts with a light beam. The apparatus includes: an optical system configured to interact with a light beam to perform a modification to one or more aspects of the light beam, an alignment system, and an actuator. The optical system comprises at least one optical element having a surface configured to interact with the light beam, the surface being continuous and non-diffuse. The alignment system is configured to align the light beam relative to the optical element surface so that the light beam interacts with the optical element while the light beam is traveling at a first beam direction relative to the surface of the optical element and the light beam is outputted from the optical element along a second beam direction relative to the surface of the optical element after the light beam and optical element have interacted.