Rotating Substrate Separation Using Segmented Circumferential Grooves
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Solution Overview
Problem
Existing separating apparatuses face challenges in efficiently and reliably separating bonded substrates, particularly when the substrates are held by different holders and require precise control to form a groove for separation without causing damage.
Innovation Solution
A separating apparatus that includes a holder to rotate the combined substrate, a separation inducing device with a blade to form a groove along the substrate's circumference, and a control device to manage the separation process, ensuring precise control and minimal damage during separation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a blade is inserted between bonded substrates to form a groove for separation, then separation can be achieved, but the groove length is limited by the blade's longitudinal length, reducing separation efficiency
Solution Approach 1:
The separation process is divided into multiple sequential groove formation operations. The holder rotates the combined substrate to different angular positions, and the blade forms multiple discrete groove portions at different locations. These segmented grooves collectively achieve complete separation, overcoming the limitation of a single blade length.
Solution Approach 2:
The solution transitions from a single-dimensional linear groove (limited by blade length) to a multi-dimensional approach by adding rotational movement. The holder rotates the substrate in the circumferential direction, creating grooves at multiple angular positions, effectively extending the separation capability beyond the blade's physical length.
2Reliability
If substrates are held by different holders requiring precise control, then separation can be performed, but the complexity of coordinating multiple holders increases device complexity
Solution Approach 1:
The control device monitors the positions and operations of both holders and the blade, coordinating their movements to ensure precise separation. The system adjusts operations based on the relative positions of the substrates and the blade, ensuring reliable separation while managing the complexity through intelligent control.
Data Source
AI summary
A separating apparatus separates a combined substrate in which a first substrate and a second substrate are bonded to each other. The separating apparatus includes a holder that holds the combined substrate and rotates the combined substrate in a circumferential direction, a separation inducing device which is equipped with a blade and forms a groove portion by inserting the blade between the first substrate and the second substrate from a side of the combined substrate held by the holder, and control circuitry that controls the holder and the separation inducing device to form the groove portion longer than a longitudinal length of the blade along the circumferential direction of the combined substrate.