Rotating Velocity Filter for Precise Pulsed Laser Deposition
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing pulsed laser deposition devices suffer from plasma plume obstruction and undesired particle deposition on plasma plates, leading to inefficient and inaccurate material deposition on substrates.
Innovation Solution
A rotating disc-shaped velocity filter with controlled filter passage openings and taper angles is used to direct high-velocity plasma plumes onto substrates while capturing slower particles on the filter walls, ensuring accurate and condensed plasma deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a plasma plate with shaped passage opening is used to shape the plasma plume, then the plasma plume can be directed onto the substrate, but part of the plasma plume is obstructed and deposited on the plasma plate around the edges of the passage opening
Solution Approach 1:
The invention removes the plasma plate component entirely and replaces it with a velocity filter consisting of a rotating disc with filter passage openings. This extraction eliminates the obstruction problem while maintaining the plasma shaping function through the velocity filter's different mechanism.
Solution Approach 2:
The velocity filter uses a rotating disc that rotates in the direction of plasma plume propagation. This dynamic rotation creates a time-varying filter passage opening that allows plasma to pass through while preventing particle accumulation, solving the obstruction problem of static plasma plates.
2Device complexity
If a stationary filter passage opening is used, then the structure is simple, but slower particles can pass through and deposit on the substrate reducing deposition accuracy
Solution Approach 1:
The filter passage opening is made dynamic by rotating the disc in the direction of plasma plume propagation. This rotation creates a time-varying opening that moves faster than the slower particles, causing them to be left behind and deposited on the disc, while allowing high-velocity plasma to pass through.
Solution Approach 2:
The rotating disc creates a periodic opening that cycles through different positions. This periodic motion allows the filter to continuously separate plasma from slower particles over multiple rotation cycles, improving deposition accuracy without complex stationary structures.
3Loss of substance
If the filter passage opening is made longer to trap more particles, then particle trapping improves, but the plasma plume becomes more dispersed and deposition accuracy decreases
Solution Approach 1:
The rotating disc creates a dynamic filter passage opening that moves through the plasma plume. This motion allows the plasma to be quickly guided through a shorter passage while the rotation itself provides the extended interaction time needed for particle trapping, resolving the length contradiction.
Solution Approach 2:
The disc rotation begins before the plasma reaches the filter passage opening, pre-positioning the opening in optimal alignment. This preliminary action allows shorter passage lengths to achieve the same particle trapping effect that would otherwise require longer passages.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the accuracy and efficiency of material deposition by shaping plasma plumes and trapping undesired particles, resulting in a more precise coating process.
Implementation Method 1
a pulsed laser (4) directed onto the target (2) at a target spot (6) for generating a plasma plume (5) of target material
Implementation Method 2
a velocity filter (8) arranged between the substrate holder (3) and the target holder (2), which velocity filter comprises a rotating, generally disc-shaped body (8) with a rotation axis (10) and with at least one filter passage opening (11) extending from one axial surface to the other axial surface of the rotating body (8)
Implementation Method 3
Particles which manage to enter the filter passage opening (11), will get in contact with the walls of the tapering opening and will be deposited at the walls of the passage opening. Due to the far higher velocity of the plasma, the plasma will be shaped by the tapering walls of the passage opening into a smaller and more condensed plume.
Data Source
Figure 1~2
Figure 3
AI summary
The invention relates to a device for pulsed laser deposition, a substrate with a substrate surface and a target with a target surface, which device comprises: - a substrate holder for holding the substrate; - a target holder for holding the target with the target surface facing the substrate surface; - a velocity filter arranged between the substrate holder and the target holder, which velocity filter comprises a rotating, generally disc-shaped body with a rotation axis and with at least one filter passage opening extending from one axial surface to the other axial surface of the rotating body; and - a pulsed laser directed onto the target at a target spot for generating a plasma plume of target material, wherein the surface of the target at the target spot faces the substrate surface, wherein the path of the at least one filter passage opening coincides with the target spot when viewed in a direction perpendicular to the surface of the target at the target spot, wherein the at least one filter passage opening tapers from the target to the substrate in a direction parallel to the rotation axis of the rotating body.