Rotational Ion Beam Scanner with Counterweight Vibration Damping
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Solution Overview
Problem
Existing methods for scanning workpieces through ion beams are slow and prone to vibration, making it difficult to achieve rapid and uniform processing, especially for large workpieces like semiconductor wafers, and require manual handling that is inefficient.
Innovation Solution
A method and apparatus that uses an elongated member with a rotational mechanism to scan workpieces through an ion beam along an arcuate path, allowing for rapid scanning while maintaining a partial vacuum and facilitating horizontal loading and unloading, with a mechanism to suspend and guide the member to reduce vibration and enable vertical orientation during processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional X-Y mechanical scanning is used to scan workpieces through ion beam, then uniform processing is achieved, but scanning speed is slow due to the mass of components being accelerated
Solution Approach 1:
Instead of moving the heavy ion beam and workpiece holder assembly horizontally across the beam path, the invention inverts the approach by keeping the ion beam stationary and rapidly moving the workpiece vertically through the beam using a light scanner. This reversal of motion direction allows much higher scanning speeds since the scanner has minimal mass compared to the entire X-Y platform assembly.
Solution Approach 2:
The invention replaces the conventional mechanical X-Y scanning system with a rapidly rotating scanner that uses centrifugal force and minimal mass to achieve high-speed workpiece movement. The scanner rotates at high speed, bringing different portions of the workpiece through the ion beam path sequentially, eliminating the need for slow mechanical translation stages.
2Productivity
If scanning speed is increased by brute force techniques, then scanning time is reduced, but excessive vibration is transmitted to the supporting members causing reliability problems
Solution Approach 1:
The scanner incorporates a counterweight that rotates opposite to the workpiece holder, creating counterbalancing centrifugal forces that cancel out the vibrations generated during high-speed rotation. This counterbalancing action prevents excessive vibration transmission to the supporting structure while maintaining high scanning speeds.
Solution Approach 2:
The system utilizes controlled mechanical vibration through the rotating scanner design, where the periodic motion is balanced and damped to minimize harmful vibrations. The high-speed rotation creates a controlled vibrational regime that can be managed through proper balancing and damping, allowing rapid scanning without compromising reliability.
3Ease of operation
If workpiece is held in horizontal position for loading and unloading, then handling is simplified, but processing requires rotation to vertical orientation which complicates the mechanism
Solution Approach 1:
The workpiece holder is designed with dynamic positioning capability, allowing it to rotate between horizontal orientation for loading/unloading and vertical orientation for processing. The holder can be positioned at different angles during operation, providing operational flexibility without requiring separate handling mechanisms for each orientation.
Solution Approach 2:
The workpiece holder serves multiple functions: it accommodates workpieces in both horizontal and vertical orientations, provides loading/unloading interface, and positions workpieces for processing. This multi-functional design eliminates the need for separate handling mechanisms, reducing overall system complexity despite the rotational capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and uniform scanning of workpieces with reduced vibration transmission, allowing for efficient processing and easy handling of large workpieces in a vertical orientation, improving processing times and reducing equipment stress.
Implementation Method 1
a source for producing a beam of ions directed along a beam path toward a workpiece
Implementation Method 2
a mechanism suspending the elongated member and rotational mechanism against gravity within the enclosure
Data Source
AI summary
A method and apparatus 300 for better controlling scanning of a workpiece 330 through an ion beam path 306 provide for mounting a workpiece 330 on an elongated member, partially repetitively rotating the elongated member 500 around a point of rotation 368 to make repetitive scans of the workpiece 330 along and arcuate path 504 and bending the elongated member 500 at a joint 322 to move the one and out of the ion beam path 306 to facilitate attachment and removal of individual workpieces 330. A motor 315 used for the rotating may be suspended within a partial vacuum enclosure 304 against gravity for raising and lowering the elongated member and 500 a workpiece 306 for linear vertical scanning.