Sample Carrier Positioning With Spring Contacts for Vacuum Biasing
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Solution Overview
Problem
Current charged particle apparatus (CPA) and X-ray photoelectron spectroscopy (XPS) systems lack a compact and versatile sample positioning system that enables efficient transfer and analysis of samples within vacuum chambers, particularly for applying electrical biases to samples during imaging and processing.
Innovation Solution
A sample positioning system comprising a sample carrier with multiple electrodes and a stage that slides along a rail, utilizing multiple spring contacts for both electrical connection and mechanical rigidity, allowing for precise positioning and biasing of samples within the vacuum chamber, and enabling transfer between tools under vacuum or inert gas.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a sample positioning system is designed to be compact and versatile for facilitating imaging, processing, manipulation, and storage operations, then the system's adaptability and functionality are improved, but the device complexity increases
Solution Approach 1:
The sample holder is designed to perform multiple functions including holding the sample, providing electrical bias through integrated electrodes, and enabling positioning within the vacuum chamber. This multi-functional design allows a single device to facilitate imaging, processing, manipulation, and storage operations without requiring separate specialized equipment for each function.
Solution Approach 2:
The system combines mechanical positioning components with electrical biasing components into an integrated sample holder assembly. The electrodes are directly incorporated into the sample holder structure, merging the mechanical support function with the electrical control function in a single unified device.
2Adaptability or versatility
If multiple electrodes are integrated into the sample holder for applying electrical biases to different portions of the sample, then the system's functionality for sample analysis is improved, but the device complexity increases
Solution Approach 1:
The electrical biasing system is segmented into multiple independent electrodes that can be individually controlled. Each electrode can apply a separate electrical bias to different portions of the sample, allowing for independent control of multiple electrical parameters simultaneously. This segmentation enables sophisticated sample analysis while keeping each individual electrode relatively simple in design.
3Ease of operation
If the sample carrier is designed for easy transfer between tools under vacuum or inert gas, then the ease of operation is improved, but the reliability of maintaining vacuum integrity may worsen
Solution Approach 1:
The coupling mechanism between the sample carrier and stage is designed to be dynamically adjustable, allowing the sample carrier to be easily inserted and removed from the stage while maintaining vacuum integrity. The releasable coupling enables quick transfer operations without requiring complex vacuum breaking or re-sealing procedures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Facilitates accurate and efficient sample transfer and analysis by providing mechanical rigidity and electrical connectivity, enabling in-operando analysis and processing of samples with the ability to apply biases, while maintaining a vacuum or inert gas environment.
Implementation Method 1
the stage electrically connectable with the multiple electrodes in the sample area via multiple spring contacts between the sample carrier and the stage
Implementation Method 2
multiple spring contacts between the sample carrier and the stage
Data Source
AI summary
A system for positioning a sample in a charged particle apparatus (CPA) or an X-ray photoelectron spectroscopy (XPS) system includes a sample carrier coupled to a stage inside the vacuum chamber of the CPA or XPS system. The system allows transferring of the sample carrier among multiple CPAs, XPS systems and glove boxes in inert gas or in vacuum. The sample carrier is releasably coupled with the stage in the vacuum chamber of the CPA or the XPS. Multiple electrodes in a sample area of the sample carrier are electrically connectable with the stage by multiple spring contacts between the sample carrier and the stage.