Sample Holder Design for Charged Particle Beam Device
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Solution Overview
Problem
Charged particle beam devices face limitations in device layout and sample handling due to the complexity of tubes and cables required for various analyses, particularly when multiple ports are formed in the sample chamber and stages with multiple rotation axes are used.
Innovation Solution
A sample holder design that includes a base portion fixed to a driving stage, a sample carrying portion, a drive guide portion, a function portion, a connection member, and a fixing guide portion, allowing for independent movement and positioning of the sample while maintaining heat insulation and facilitating easy sample handling and cooling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple dedicated ports are formed in the sample chamber to accommodate tubes and cables for various sample analyses, then the adaptability for different sample analyses is improved, but the device complexity and layout limitations increase
Solution Approach 1:
The sample holder is designed with a universal connection structure that can accommodate multiple types of tubes and cables through a single integrated port. The connection member includes multiple connection portions that can interface with different analysis devices, eliminating the need for multiple dedicated ports in the sample chamber while maintaining adaptability for various sample analyses.
Solution Approach 2:
Multiple connection functions are merged into a single integrated connection member on the sample holder. Instead of having separate ports for different tubes and cables, the design combines all connection interfaces into one unified structure, reducing the number of ports required in the sample chamber and simplifying the overall device layout.
2Adaptability or versatility
If a stage with multiple rotation axes is provided to enable flexible sample positioning, then the positioning flexibility is improved, but the connection of tubes and cables to the stage or sample holder becomes complex
Solution Approach 1:
The connection member acts as an intermediary between the rotating sample holder and the stationary tubes/cables. It includes flexible connection portions that can accommodate the rotational movements of the sample holder while maintaining reliable connections to the tubes and cables, thus enabling flexible positioning without complex connection arrangements.
Solution Approach 2:
The connection structure is designed to be dynamic rather than rigid, allowing it to adapt to the rotational movements of the sample holder. The connection member can flex and move with the sample holder's rotation axes, maintaining connection integrity throughout the range of motion without requiring complex fixed connection mechanisms.
3Stability of the object's composition
If the base portion and connection member are fixed relative to each other, then the structural stability is improved, but the ability to independently position and adjust the sample is reduced
Solution Approach 1:
The sample holder is segmented into distinct functional portions: a base portion for structural support, a sample carrying portion for holding the sample, and a connection member for attaching tubes and cables. These segments are connected through support portions that allow relative movement, enabling independent positioning of each segment while maintaining overall structural stability.
Solution Approach 2:
The support portions between the base portion and connection member are designed to allow controlled relative movement. This dynamic connection enables the connection member to be positioned independently of the base portion, facilitating easy sample positioning and adjustment while maintaining structural integrity during operation.
4Adaptability or versatility
If tubes and cables are arranged on multiple dedicated ports in the sample chamber, then the functionality for various analyses is improved, but the layout freedom and device simplicity are reduced
Solution Approach 1:
The connection functionality is extracted from the sample chamber structure and relocated to the sample holder itself. Instead of forming multiple dedicated ports in the sample chamber, the connection member with multiple connection portions is attached to the sample holder, allowing all connections to be made at a single location on the holder rather than requiring multiple fixed ports in the chamber.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables flexible positioning and posture adjustment of the sample, reduces device complexity, and ensures accurate sample handling and analysis by preventing twisting or winding of connection members, thereby improving the accuracy of sample processing and analysis.
Implementation Method 1
a first support portion configured to support the base portion, which is configured to be driven by the driving stage, and the connection member in such a manner that the base portion and the connection member are movable relative to each other
Implementation Method 2
a fixing guide portion, which is connected to the base portion through intermediation of the first support portion, and is configured to guide fixing of the connection member independently of the base portion
Implementation Method 3
a drive guide portion configured to guide synchronous drive of the base portion and the sample carrying portion
Implementation Method 4
the function portion may be configured to cool the sample carrying portion with use of a refrigerant which flows through a flow passage formed inside and the connection member
Implementation Method 5
the drive guide portion may have a heat-insulating structure
Data Source
AI summary
A sample holder (19) includes a base portion (41), a sample carrying portion (42), a rotation guide portion (43), a cooling stage (46), a connection member (47), a first support portion, and a fixing guide portion (48). The base portion (41) is configured to be fixed to a stage (12), which is configured to be driven to rotate by a stage driving mechanism (13). The rotation guide portion (43) is configured to guide synchronous rotation of the base portion (41) and the sample carrying portion (42). The cooling stage (46) is configured to cool a sample (S). The connection member (47) is configured to be connected to the cooling stage (46). The first support portion is configured to support the base portion (41), which is configured to be driven to rotate by the stage (12).