Universal Sample Holder Clip for Charged Particle Beam Compatibility
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Solution Overview
Problem
Conventional focused ion beam apparatuses require a special compatible sample stage for different-type charged particle beam apparatuses, leading to increased equipment costs.
Innovation Solution
A sample holder with a clip system that securely fastens to a support section, allowing for easy attachment and detachment without damaging the sample, and is compatible with various charged particle beam apparatuses, preventing an increase in equipment costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a special compatible sample stage is used for different-type charged particle beam apparatuses, then sample holder compatibility is improved, but equipment costs increase
Solution Approach 1:
The sample holder is designed with a universal support section that can be attached to different types of charged particle beam apparatuses (FIB, SEM, TEM) through a standardized mounting interface. The support section includes a flat mounting surface with positioning features that accommodate various holder types without requiring specialized stages for each apparatus type.
Solution Approach 2:
The sample holder is divided into separable components: a reusable support section and interchangeable sample holding members. This segmentation allows the expensive support section to be used across multiple apparatuses while only the inexpensive sample holding members need to be swapped, reducing overall system complexity and cost.
2Device complexity
If manual transfer with tweezers is used, then equipment costs are reduced, but sample damage risk increases
Solution Approach 1:
The sample holder incorporates self-aligning features including positioning protrusions and recesses that automatically guide the sample holding member into the correct position on the support section during attachment and detachment operations, eliminating the need for manual alignment by operators and reducing the risk of sample damage.
Solution Approach 2:
The support section acts as an intermediary between the sample holding member and the apparatus mounting interface. It provides a stable, precision-machined platform with positioning features that ensure repeatable, damage-free attachment and detachment operations, replacing the need for direct manual manipulation with tweezers.
3Reliability
If a clip system is added to the sample holder, then sample holding security is improved, but device complexity increases
Solution Approach 1:
The clip is made from an elastic material that forms a flexible, thin-walled structure. This elastic clip can be deformed to open and close around the sample holding member, providing secure retention through elastic force rather than complex mechanical locking mechanisms. The flexibility allows simple attachment by snapping the clip onto the support section.
Data Source
AI summary
A sample holder, a member mounting device, and a charged particle beam apparatus are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses without an increase in equipment costs. The charged particle beam apparatus includes a holder unit for removably fastening a sample holder for receiving a sample, and a sample stage unit for loading the holder unit in a sample chamber. The sample holder includes a sample holding member for receiving a sample, a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.