Sample Holder Film Integrity via Beam Dose Monitoring
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Solution Overview
Problem
The existing sample inspection methods using a film to prevent pressure differences in SEM chambers face issues with film damage from electron beam irradiation, leading to contamination and the need for expensive, specialized sample holders.
Innovation Solution
A method and apparatus that monitor the film's condition and electron beam dose during inspection, allowing for real-time detection of damage and prevention of further irradiation when the film's integrity is compromised, using a simple and cost-effective sample holder design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a film is used to seal the sample holder to withstand pressure difference, then the sample can be inspected without exposing to reduced pressure ambient, but the film is damaged by primary beam irradiation leading to destruction and contamination
Solution Approach 1:
The patent applies preliminary action by forming a protective coating on the film surface before beam irradiation. This coating is designed to absorb beam damage preferentially, protecting the underlying film from destruction. The coating is applied in advance to prevent the harmful effects of beam irradiation on the film's integrity.
Solution Approach 2:
The protective coating acts as an intermediary between the beam and the film. It absorbs the harmful effects of beam irradiation and transfers minimal damage to the film, allowing the film to maintain its sealing function while still permitting beam transmission for sample inspection.
2Measurement precision
If the film is made thinner to improve beam transmission, then inspection quality improves, but the film becomes more susceptible to damage from pressure difference and beam irradiation
Solution Approach 1:
The patent uses a composite structure consisting of a thin film combined with a protective coating. The thin film provides good beam transmission for high-quality inspection, while the protective coating adds mechanical strength and resistance to both pressure difference and beam irradiation damage. This composite approach allows the system to achieve both good inspection quality and sufficient structural integrity.
3Reliability
If specialized expensive sample holders are used to prevent film damage, then film integrity is maintained, but the cost and complexity of the system increases
Solution Approach 1:
The patent employs a disposable protective coating that can be applied cheaply to the film surface. This coating is designed to be consumed or damaged in place of the expensive film, providing a cost-effective solution to protect the film integrity without requiring expensive specialized sample holders. The low cost of the coating makes it economically viable compared to specialized holders.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents film destruction and contamination within the SEM chamber by monitoring and controlling the electron beam dose, ensuring the apparatus remains clean and the sample holder is inexpensive to produce.
Implementation Method 1
The film permits transmission of an electron beam
Implementation Method 2
an electron beam is directed from outside the sample holder at the sample placed in the holder via the film on the sample holder disposed in the SEM sample chamber that is in a reduced-pressure ambient. Backscattered electrons are emitted from the irradiated sample
Data Source
AI summary
A sample holder is offered which is used when a sample is inspected by irradiating the sample with a primary beam consisting of a charged-particle beam (such as an electron beam) via a film. Furthermore, method and apparatus for preventing destruction of the film due to a pressure difference by detecting damage to the film during inspection are offered.