Sample Holder Gel Sealing for Junction Durability

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Solution Overview

Problem

Existing sample holders in semiconductor manufacturing face issues with durability due to moisture ingress and stress concentration at the junctions of electrically conducting members and lead pins, leading to potential damage and reduced reliability.

Innovation Solution

A sample holder design featuring an insulating base body with an electrically conducting member, a lead pin, and a tubular member surrounded by a gel-like first member and a solid second member, which absorbs moisture and external forces, and relieves thermal stress, enhancing durability by preventing damage to the junctions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional insulating structures are used to protect electrical junctions, then manufacturing is simpler, but moisture ingress and stress concentration cause reduced durability

Engineering Contradiction:
ImprovedurabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent employs a composite sealing structure combining a tubular member (first sealing element) and a sealant (second sealing element). The tubular member provides structural protection and initial sealing, while the sealant fills gaps and provides flexible sealing. This composite approach enhances moisture resistance and stress absorption compared to conventional single-material sealing, directly addressing the durability issue without excessive complexity.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The gel formable substance acts as an intermediary material between the electrical junction and the external environment. It fills the interior of the tubular member and provides a flexible sealing layer that absorbs thermal stress and prevents moisture ingress. This intermediary substance bridges the gap between rigid structural components and environmental protection requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Strength

If rigid sealing structures are used to protect junctions, then structural strength is improved, but stress concentration leads to damage

Engineering Contradiction:
Improveprotection strengthVSAvoidstress concentration
Core Design Contradiction:
StrengthVSStress or pressure

Solution Approach 1:

The patent utilizes parameter changes in the sealant material, specifically its ability to transition from a liquid or paste state to a gel state. The gel formable substance provides rigidity for structural support while maintaining flexibility to absorb stress. This parameter change allows the sealing material to adapt to thermal expansion and contraction without concentrating stress at critical junction points.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The sealant layer functions as a flexible sealing element within the tubular member structure. Unlike rigid sealing materials, the gel-formable substance can deform elastically under stress, accommodating thermal expansion and contraction of the electrical components. This flexibility prevents stress concentration while maintaining the protective sealing function.

Inventive Principle:
Principle #30Flexible shells and thin films

3Reliability

If complex sealing structures are implemented to prevent moisture ingress, then durability is improved, but manufacturing becomes more difficult

Engineering Contradiction:
Improvemoisture resistanceVSAvoidassembly ease
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The sealing structure is segmented into distinct functional elements: the tubular member providing structural containment and primary sealing, and the gel formable substance providing flexible gap filling and secondary sealing. This segmentation allows each component to be optimized independently and assembled in a straightforward sequence, improving manufacturability while achieving superior moisture protection.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The gel formable substance exhibits self-leveling and self-sealing properties. When applied to the electrical junction, it automatically fills gaps and conform to the cavity geometry, eliminating the need for precise manual positioning or complex assembly procedures. This self-service characteristic simplifies manufacturing while ensuring effective sealing.

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively prevents moisture ingress and absorbs external forces, thereby increasing the durability and reliability of the sample holder by reducing the likelihood of damage to the electrically conducting member and lead pin junctions.

Implementation Method 1

a first member which is located in an interior of the tubular member and covers a junction between the electrically conducting member and the lead pin, the first member being in a gel form; and a second member which covers the first member and is filled in the interior

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Implementation Method 2

the first member being in a gel form

Methodology Applied
Scientific EffectGel structure: Gel

Data Source

PatentUS11640920B2Sample holder
Publication Date: 2023.05.02 KYOCERA CORP
  • US11640920B2 patent drawing
  • US11640920B2 patent drawing
  • US11640920B2 patent drawing

AI summary

A sample holder according to the disclosure includes: an insulating base body in plate form; an electrically conducting member disposed on a lower face of the insulating base body; a lead pin joined to the electrically conducting member so as to extend downwardly from the insulating base body; a tubular member joined to the lower face of the insulating base body so as to surround the lead pin; a first member which is located in an interior of the tubular member and covers a junction between the electrically conducting member and the lead pin, the first member being in a gel form; and a second member which covers the first member and is filled in the interior.