Sample Introduction Device Vacuum Integrity Control

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Solution Overview

Problem

In charged particle beam instruments like transmission electron microscopes, the introduction of sample holders into the vacuum sample chamber is often marred by violent insertion due to pressure differences, risking sample damage and vacuum deterioration, and there is a risk of damaging the instrument with inappropriate sample holder lengths or shapes.

Innovation Solution

A sample introduction device with a pre-evacuation chamber, mechanical drive arrangement, and controller that supports the sample holder, allowing controlled movement and preventing inappropriate holders from entering the chamber by using a support member and air cylinders to counteract the pressure difference and ensure proper alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual insertion of sample holder is performed, then user control over insertion process is improved, but risk of sample damage and vacuum deterioration increases

Engineering Contradiction:
Improveuser controlVSAvoidsample safety
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

A support member is introduced as an intermediary between the sample holder and the insertion mechanism. The support member engages with the sample holder and provides controlled support during insertion, preventing violent movement while maintaining user control through the automated drive arrangement.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The manual mechanical insertion process is replaced with an automated mechanical drive arrangement that uses a support member to control the insertion. This substitution eliminates the need for manual support while ensuring reliable, damage-free insertion through automated control mechanisms.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If automated mechanical drive arrangement is used, then insertion control is improved, but risk of damaging instrument components with inappropriate holders increases

Engineering Contradiction:
Improveinsertion controlVSAvoidinstrument damage risk
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The controller performs preliminary verification operations before the actual insertion. It checks whether the sample holder is appropriate for the chamber, and only if verification passes does it proceed with the insertion using the mechanical drive arrangement. This preliminary check prevents inappropriate holders from damaging instrument components.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The controller monitors the insertion process and provides feedback control. It verifies the appropriateness of the sample holder before insertion and adjusts the drive arrangement operation accordingly, preventing damage to instrument components by stopping or modifying the insertion if inappropriate holders are detected.

Inventive Principle:
Principle #23Feedback

3Reliability

If support member is used to prevent violent insertion, then sample safety is improved, but device complexity increases

Engineering Contradiction:
Improvesample safetyVSAvoidmechanical structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The support member is designed to perform multiple functions: it supports the sample holder during insertion, prevents violent movement, and can be integrated with the mechanical drive arrangement for automated operation. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Object-affected harmful factors

If verification of sample holder appropriateness is performed, then instrument protection is improved, but operation time increases

Engineering Contradiction:
Improveinstrument protectionVSAvoidinsertion time
Core Design Contradiction:
Object-affected harmful factorsVSLoss of time

Solution Approach 1:

The verification of sample holder appropriateness is performed as a preliminary action before insertion. The controller checks whether the holder is suitable for the chamber, and only if verification passes does it proceed with insertion. This preliminary verification protects the instrument while minimizing time loss by enabling quick go/no-go decisions.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Facilitates safe and controlled introduction of samples into the sample chamber, preventing damage to both the sample and the instrument, while ensuring appropriate sample holder lengths and shapes are used, thus maintaining vacuum integrity and preventing instrument damage.

Implementation Method 1

a force urging the sample holder into the sample chamber is applied to the sample holder due to the pressure difference between the sample chamber and the outside

Methodology Applied
Scientific EffectPressure difference: Pressure Gradient

Implementation Method 2

a mechanical drive arrangement for moving the sample holder

Methodology Applied
Scientific EffectMechanical force: Mechanical Force

Data Source

PatentUS9318301B2Sample introduction device and charged particle beam instrument
Publication Date: 2016.04.19 JEOL LTD
  • US9318301B2 patent drawing
  • US9318301B2 patent drawing
  • US9318301B2 patent drawing

AI summary

A sample introduction device (100) has a pre-evacuation chamber (2), a sample holder (10), a mechanical drive arrangement (30) for moving the sample holder (10), and a controller (90). The controller (90) performs a first operation for controlling the mechanical drive arrangement (30) to move a support member (20) such that this support member (20) supports the sample holder (10) when its sample holding portion (12) is in the pre-evacuation chamber (2) and to bring the support member (20) to a halt, a second operation for making a decision as to whether the sample holding portion (12) can be moved into the sample chamber (1), based on the position at which the support member (20) is halted, and a third operation for moving the support member (20) supporting the sample holder (10) such that the sample holding portion (12) moves from the pre-evacuation chamber (2) into the sample chamber (1) if the decision is affirmative to indicate that the sample holding portion (12) can be moved into the sample chamber (1).