Sample Milling Camera Alignment Using Ion Beam Trace Position
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In sample milling apparatuses, the adjustment of the positioning camera relative to the ion beam impact point is challenging, especially when the distance between the swing axis and the beam impact point exceeds a tolerable range, making it difficult to precisely judge the milling position and timing.
Innovation Solution
A method and apparatus for adjusting the sample milling apparatus, which involves observing the trace of the ion beam with the positioning camera held relative to the swing axis, and extracting a display image to bring the ion beam impact point and the display image field of view into coincidence, allowing easy identification of the swing axis position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the positioning camera is mechanically adjusted to bring the beam impact point into coincidence with the center of the field of view, then the positioning accuracy is improved, but the ability to trace the swing axis position is lost
Solution Approach 1:
The patent creates a virtual copy of the swing axis position by detecting the trace position in the observation image and calculating corresponding swing axis position information. This virtual copy allows the system to maintain positioning accuracy while preserving swing axis traceability through software processing rather than mechanical adjustment.
Solution Approach 2:
The patent replaces the mechanical adjustment system with an information processing system. Instead of mechanically adjusting the camera position, the system uses image processing to detect the beam trace and calculate the swing axis position, substituting physical mechanical operations with computational methods.
2Productivity
If the distance between the swing axis and the beam impact point exceeds a tolerable range, then the milling operation can be performed, but the milling position deviates from the observation camera field of view
Solution Approach 1:
The patent implements a feedback mechanism where the observation camera continuously monitors the beam impact position, and this information is fed back to calculate and adjust the swing axis position. This closed-loop feedback system ensures that even when the distance between swing axis and beam impact point varies, the milling position remains within the observation field of view.
Solution Approach 2:
The patent introduces an intermediary information processing step that detects the beam trace position in the observation image and uses this intermediate information to calculate the swing axis position. This intermediary process acts as a mediator between the beam impact point and the swing axis, ensuring positional accuracy is maintained.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This adjustment method ensures that the positional relationship between the observation camera's field of view and the swing axis remains constant, facilitating the identification of the swing axis position and preventing milling position deviations from the observation camera's field of view.
Implementation Method 1
an ion source for emitting an ion beam at a sample such that a trace of the impinging ion beam is left on the sample
Data Source
AI summary
A sample milling apparatus includes an ion source, a swinging mechanism for swinging a sample, a positioning camera for bringing a target milling position on the sample into coincidence with the impact point of an ion beam, and a display section for displaying an image captured by the positioning camera. The adjustment method starts with observing the trace of the impinging ion beam left on the sample with the positioning camera while the position of the positioning camera is held relative to the swing axis of the swinging mechanism and capturing an observation image. Then, a display image to be displayed on the display section is extracted from the observation image based on the position of the trace, thus bringing the beam impact point and the position of the field of view of the display image into coincidence.