Sample Preparing Device with Independent Manipulator Rotation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current focused ion beam systems face challenges in efficiently preparing thin TEM samples for observation, as the samples are prone to damage during transfer and final thinning is influenced by the upper structure, requiring complex preprocessing and limited operational freedom due to restricted space in composite systems.
Innovation Solution
A sample preparing device with a sample stage and manipulator that allows independent rotation of the sample stage and manipulator, enabling the sample piece to be easily rotated by 90 degrees or more, allowing for flexible fixation and alignment of the sample piece on the sample table without additional preprocessing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the sample is prepared thick to be transferred to the sample table and then thinned finally, then the sample can be transferred safely, but the final thinning is influenced by the upper structure and requires complex preprocessing
Solution Approach 1:
The patent applies inversion by rotating the sample 180 degrees to observe from the back side. This allows the observation surface to be prepared first without being influenced by upper structures, eliminating the need for complex preprocessing while ensuring safe transfer through proper orientation management
Solution Approach 2:
The patent introduces dynamic rotation capability to the sample stage, allowing the sample to be rotated by 180 degrees during the preparation process. This dynamic adjustment enables flexible repositioning of the observation surface, permitting direct preparation of the observation area without preliminary polishing while maintaining transfer safety through controlled orientation changes
2Adaptability or versatility
If a manipulator with rotation axis and tilt mechanism is used to rotate the sample, then the sample posture can be adjusted, but the device complexity increases and space requirement is greatly restricted
Solution Approach 1:
The patent segments the rotation function from the manipulator and assigns it to a dedicated sample stage with rotation capability. The manipulator retains only its original functions while the sample stage independently provides 180-degree rotation, simplifying the manipulator structure and reducing overall device complexity while maintaining full posture adjustment capability
Solution Approach 2:
The patent adds a rotational dimension to the sample stage rather than complicating the manipulator's spatial mechanisms. By enabling the sample stage to rotate the sample 180 degrees around a vertical axis, the system achieves posture adjustment capability without requiring additional spatial dimensions or complex mechanical linkages in the manipulator
3Ease of operation
If the sample is extracted and fixed to the sample table in the same posture, then the operation is simple, but the final thinning is influenced by the upper structure and observation quality is reduced
Solution Approach 1:
The patent applies inversion by rotating the sample 180 degrees so that the back side becomes the observation surface. This eliminates the influence of upper structures on etching efficiency, improving observation quality while maintaining operational simplicity through automated rotation control that requires minimal additional user input
4Productivity
If preliminary polishing of the back side is performed to extract samples from the back side, then samples can be obtained, but the process requires special preprocessing and polishing endpoint detection is difficult
Solution Approach 1:
The patent applies inversion by observing from the back side without preliminary polishing. The sample is prepared in the normal orientation, then rotated 180 degrees for observation, allowing direct extraction of the observation surface without time-consuming polishing processes and eliminating endpoint detection difficulties
Solution Approach 2:
The patent performs the rotation action in advance before extraction, positioning the correctly oriented observation surface toward the manipulator. This preliminary orientation adjustment eliminates the need for subsequent polishing operations to create the observation surface, streamlining the extraction process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient preparation of high-quality TEM samples without structural influence, improving practicality and operational simplicity by allowing arbitrary rotation of the sample posture, thus contributing significantly to semiconductor process monitoring and failure analysis.
Implementation Method 1
removing both sides of an observing cross section by ion beam etching
Implementation Method 2
The needle is brought close to the sample to be fixed thereto by ion beam deposition
Data Source
AI summary
A sample preparing device has a sample stage that supports a sample and undergoes rotation about a first rotation axis to bring a preselected direction of the sample piece into coincidence with an intersection line between a first plane formed by a surface of the sample piece and a second plane. A manipulator holds sample piece of the sample and undergoes rotation about a second rotation axis independently of the sample stage to rotate the sample piece to a preselected position in the state in which the preselected direction of the sample piece coincides with the intersection line. The manipulator is disposed relative to the sample stage so that an angle between the second rotation axis and the surface of the sample is in the range of 0° to 45°. The second plane corresponds to a plane obtained by rotating around the second rotation axis a line segment which is vertical to the surface of the sample and of which one end corresponds to an intersection between the surface of the sample and the second rotation axis.