SAW Resonator Euler Angle Optimization for Frequency Stability

The patent changes the physical and chemical parameters of the quartz crystal substrate by precisely controlling the Euler angles (φ, θ, Ψ) to specific ranges. This parameter optimization allows the device to achieve good frequency-temperature characteristics without requiring increased electrode film thickness, thereby maintaining environmental resistance. The parameter change approach resolves the contradiction by finding an optimal operating point in the parameter space where both temperature stability and reliability are satisfied.

The patent optimizes the Euler angles of the quartz crystal substrate to specific ranges, which changes the fundamental acoustic and elastic parameters of the material. This parameter optimization enables the device to achieve both good frequency-temperature characteristics and high Q value simultaneously, resolving the contradiction between temperature stability and energy loss without requiring increased electrode thickness.

The patent changes the crystal orientation parameters (Euler angles) to optimal ranges that inherently provide both temperature stability and long-term temporal stability. By optimizing the substrate parameters rather than increasing electrode thickness, the device achieves frequency-temperature characteristics improvement without the degradation of temporal change characteristics that would result from thicker electrodes.

The patent resolves the manufacturing complexity issue by changing the substrate orientation parameters (Euler angles) rather than increasing electrode film thickness. This approach simplifies the manufacturing process because it requires precise control of substrate cutting angles but avoids the need for depositing thicker electrode films, which would increase process complexity and cost.