Scanning Probe Microscope Self-Tuning Via System Identification

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Solution Overview

Problem

Current scanning probe microscopes face challenges in efficient control due to varying control conditions over time, requiring skilled operators for manual tuning, which limits throughput and reliability, and introduces operator-dependency in measurement results.

Innovation Solution

A method and system for scanning probe microscopes that utilize system identification measurements to automatically adjust control parameters by introducing excitation signals with multiple frequency components, allowing for automated tuning of the control loop based on model response functions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If manual tuning of control parameters is performed by skilled operators, then control stability can be maintained, but throughput is limited and operator-dependency increases

Engineering Contradiction:
Improvecontrol stabilityVSAvoidthroughput
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The control system performs self-tuning by automatically identifying system parameters and adjusting control parameters without human intervention. The system uses excitation signals to identify cantilever properties and automatically adapts control parameters, eliminating the need for skilled operators to manually tune the system while maintaining control stability.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system automatically changes control parameters based on identified system characteristics. By measuring the cantilever's response to excitation signals and identifying its resonant frequency and quality factor, the system dynamically adjusts control parameters to optimize performance, thereby improving throughput without sacrificing stability.

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If manual tuning of control parameters is performed, then control adaptability can be achieved, but measurement precision may be affected by operator-dependency

Engineering Contradiction:
Improvecontrol adaptabilityVSAvoidmeasurement precision
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The system eliminates operator-dependency by automatically identifying system parameters and adapting control parameters. This self-service approach ensures consistent, objective tuning that is not influenced by individual operator skills or judgment, thereby improving measurement precision while maintaining control adaptability.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system uses feedback from the cantilever's response to excitation signals to automatically adjust control parameters. By continuously monitoring the system's behavior and adapting parameters based on measured performance, the system achieves both adaptability and precision without human intervention.

Inventive Principle:
Principle #23Feedback

3Reliability

If control parameters are manually adjusted during operation, then control performance can be optimized, but time is lost and throughput is reduced

Engineering Contradiction:
Improvecontrol performanceVSAvoidtuning time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system performs preliminary identification of system parameters using excitation signals before normal measurement operations begin. By pre-identifying the cantilever's resonant frequency and quality factor, the system can immediately use optimized control parameters without requiring time-consuming manual adjustment during operation, thus maintaining control performance while reducing time loss.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system automatically performs parameter identification and control optimization without requiring operator intervention during operation. This self-service capability eliminates the time loss associated with manual tuning while maintaining optimal control performance throughout the measurement process.

Inventive Principle:
Principle #25Self-service

4Productivity

If automated control parameter setting is implemented, then throughput is improved, but control stability may deteriorate without proper tuning

Engineering Contradiction:
ImprovethroughputVSAvoidcontrol stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The automated system dynamically changes control parameters based on accurately identified system characteristics. By using excitation signals to measure the cantilever's resonant frequency and quality factor, the system calculates optimal control parameters that maintain stability while enabling high-speed operation, thus improving throughput without sacrificing control stability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The system uses feedback from the identified system parameters to automatically adjust control parameters. This closed-loop approach ensures that control parameters are optimized for the specific cantilever and sample conditions, maintaining control stability while enabling automated high-throughput operation.

Inventive Principle:
Principle #23Feedback

Data Source

PatentEP3833986B1A scanning probe microscope and a method for operating thereof
Publication Date: 2025.07.09 NEDERLANDSE ORG VOOR TOEGEPAST NATUURWETENSCHAPPELIJK ONDERZOEK TNO
  • EP3833986B1 patent drawingFigure 1
  • EP3833986B1 patent drawingFigure 2
  • EP3833986B1 patent drawingFigure 3

AI summary

A method of operating a scanning probe microscope, wherein a control loop is provided which is configured for controlling one or more feedback parameters of the scanning probe microscope. One or more system identification measurements are performed during operation of the control loop, wherein during the one or more system identification measurements an excitation signal with a plurality of frequency components is introduced in the control loop and a resulting response signal indicative of a cantilever displacement or a stage-sample distance between a sensor device and a sample is measured. A model response function is identified using said excitation signal and said resulting response signal, wherein one or more settings and/or input signals are adapted in the control loop based on the identified model response function. The scanning probe microscope is used for characterization of the sample using the adapted one or more settings and/or input signals.