Schottky Diode Anode Segmentation for Leakage Reduction

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Solution Overview

Problem

Schottky diodes on AlGaN/GaN heterostructures suffer from high leakage current when reverse biased, leading to power losses due to incomplete depletion of the 2DEG layer under the Schottky contact, and existing solutions either increase resistance or capacitance in forward bias mode.

Innovation Solution

A Schottky diode structure with a dielectric layer between the anode and the upper III-nitride layer, configured to pinch off the 2DEG layer in reverse bias mode, comprising a first portion directly adjoining the anode and a second portion separated from the anode by a thin dielectric material, minimizing anode size and forward bias resistance while reducing leakage current.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a Schottky diode is formed on AlGaN/GaN heterostructure with standard structure, then forward voltage drop is low and switching speed is fast, but leakage current is high in reverse bias mode

Engineering Contradiction:
Improvepower lossVSAvoidleakage current
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The anode is divided into two distinct portions: a first portion that directly contacts the AlGaN layer to form a Schottky barrier, and a second portion that is separated from the AlGaN layer by a dielectric material. This segmentation allows the first portion to handle forward conduction while the second portion, isolated by the dielectric, creates a depletion region that pinches off the 2DEG layer in reverse bias, thereby reducing leakage current without increasing forward resistance

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A dielectric material layer is introduced as an intermediary between the second portion of the anode and the AlGaN layer. This dielectric layer has a thickness of 2-30nm and serves as a mediator that electrically isolates the second anode portion from the 2DEG layer while still allowing the structure to benefit from the high breakdown voltage of GaN. The dielectric acts as a barrier that prevents direct carrier injection in reverse bias, reducing leakage current

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the anode is completely separated from the upper III-nitride layer by dielectric material to reduce leakage, then reverse bias leakage current decreases, but forward bias resistance increases

Engineering Contradiction:
Improveleakage currentVSAvoidforward resistance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The anode is segmented into two portions with different functions: the first portion maintains direct contact with the AlGaN layer to provide low-resistance path for forward current, while the second portion is separated by dielectric to reduce reverse leakage. This segmentation resolves the contradiction by allowing each portion to optimize for its specific bias condition

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the anode structure are given different properties: the first portion has direct metal-semiconductor contact for low forward resistance, while the second portion has dielectric isolation for reverse leakage suppression. The local quality varies spatially to meet different functional requirements in different operating conditions

Inventive Principle:
Principle #3Local quality

3Reliability

If a thick dielectric layer is used to completely isolate the anode from the upper III-nitride layer, then leakage current is reduced, but device capacitance increases

Engineering Contradiction:
Improveleakage currentVSAvoidcapacitance
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The dielectric layer thickness is precisely controlled within the range of 2-30nm, which is thin enough to minimize capacitance effects but thick enough to provide adequate electrical isolation and pinch-off of the 2DEG layer. This parameter optimization resolves the contradiction between leakage reduction and capacitance minimization

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The dielectric layer effectively pinches off the 2DEG layer in reverse bias mode, significantly reducing leakage current and maintaining low resistance and capacitance in forward bias mode, thereby minimizing power losses.

Implementation Method 1

the dielectric material being configured to pinch off the 2DEG layer in the reverse bias region of the diode

Methodology Applied
Scientific EffectPinch-off effect:

Implementation Method 2

the high mobility and high electron density of the 2DEG-layer (2-dimensional electron gas) appearing between the GaN and the AlGaN layer as a result of the difference of piezoelectric and spontaneous polarization

Methodology Applied
Scientific EffectPiezoelectric polarization: Piezoelectric Effect

Implementation Method 3

the high mobility and high electron density of the 2DEG-layer (2-dimensional electron gas) appearing between the GaN and the AlGaN layer as a result of the difference of piezoelectric and spontaneous polarization

Methodology Applied
Scientific EffectSpontaneous polarization:

Implementation Method 4

an anode comprising a first portion that forms a Schottky barrier contact with the upper III-nitride layer

Methodology Applied
Scientific EffectSchottky barrier effect:

Data Source

PatentEP2722890B1Schottky diode structure and method of fabrication
Publication Date: 2020.12.16 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • EP2722890B1 patent drawingFigure 1a~1b
  • EP2722890B1 patent drawingFigure 2
  • EP2722890B1 patent drawingFigure 3a~3b

AI summary

The present invention is related to a Schottky diode device comprising ● at least a lower and an upper III-nitride layer (4,5) forming a heterojunction therebetween, ● a 2DEG layer (6) forming or obtainable in the lower of the two layers, so that a 2DEG layer may be formed in the lower of the two layers, ● an anode (11) comprising a first portion (15) that forms a Schottky barrier contact (10) with the upper III-nitride layer and a second portion (16) that is separated from the upper III-nitride layer by a layer of dielectric material (17), the second portion being located between the anode and the cathode, the dielectric material being configured to pinch off the 2DEG layer in the reverse bias region of the diode, said first and second portion being directly adjoining, ● a passivation area (7) isolating the anode and cathode from each other. The invention is equally related to a method for producing a device of the invention, possibly in an integrated process for producing a Schottky diode and a HEMT transistor.