Four-Layer SCR Isolation Structure for Higher ESD Holding Voltage

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Solution Overview

Problem

Silicon-controlled rectifiers (SCRs) have a low holding voltage, making them unsuitable for high-voltage applications due to the risk of unintended electrostatic discharge (ESD) triggering, which can cause electrical disturbances or damage, and increasing the holding voltage through series arrangement is not feasible due to substrate parasitics, especially in high-voltage products.

Innovation Solution

A four-layer semiconductor device with epitaxial layers and electrical insulation that reduces the current gain product of bipolar transistors, thereby increasing the holding voltage beyond typical operational limits, using a combination of deep trench isolation and buried implants to adjust breakdown and triggering voltages, and allowing for bi-directional operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the holding voltage is increased to above operational voltage levels, then the risk of unintended ESD triggering is reduced, but the device becomes unsuitable for high voltage applications

Engineering Contradiction:
Improveholding voltageVSAvoidoperational voltage range
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The device is divided into multiple SCR units connected in series, each contributing to the overall holding voltage. This segmentation allows the total holding voltage to be distributed across several devices, enabling the system to achieve high holding voltage suitable for high voltage applications while maintaining reliability.

Inventive Principle:
Principle #1Segmentation

2Reliability

If several SCRs are arranged in series to increase holding voltage, then the holding voltage increases above operational voltage, but substrate parasitics make this method infeasible for high voltage products

Engineering Contradiction:
Improveholding voltageVSAvoidsubstrate parasitics
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

An intermediate n-type region is introduced between the PNP and NPN transistors to act as a mediator. This intermediate region provides a controlled current path that bypasses the substrate parasitics, allowing the series connection of SCRs to achieve high holding voltage without being limited by substrate parasitic effects.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If fully isolated device technologies such as Silicon-on-Insulator are used to increase holding voltage, then the holding voltage increases through simple device stacking, but high investment is required due to silicon real estate and material costs

Engineering Contradiction:
Improveholding voltageVSAvoidinvestment cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The invention changes the doping parameters and structural configuration of the semiconductor device to achieve high holding voltage using standard silicon technology. By adjusting the doping concentrations and introducing the intermediate n-type region, the device achieves high holding voltage without requiring expensive Silicon-on-Insulator technology, thereby reducing manufacturing investment.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively increases the holding voltage of the four-layer semiconductor device beyond standard limits, reducing the risk of unintended ESD triggering and enabling reliable operation in high-voltage environments while maintaining efficient current flow.

Implementation Method 1

an electrical insulation extending at least partially inside the epitaxial layer and that prevents a current from flowing between the first device terminal and the second device terminal that does not at least partially flow through the semiconductor substrate

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Implementation Method 2

two bipolar transistors are formed. A first bipolar transistor is formed using the first contact region, which is of the first charge type, the first region, which is of the second charge type, and the semiconductor substrate, which is of the first charge type

Methodology Applied
Scientific EffectBipolar transistor operation:

Data Source

PatentEP4350768A1Four-layer semiconductor device and ESD protection circuit
Publication Date: 2024.04.10 NEXPERIA BV
  • EP4350768A1 patent drawingFigure 1
  • EP4350768A1 patent drawingFigure 2
  • EP4350768A1 patent drawingFigure 3

AI summary

Aspects of the present disclosure generally relate to a four-layer semiconductor device, such as a silicon-controlled rectifier. Further aspects of the present disclosure relate to an electrostatic discharge, ESD, protection circuit comprising the same. In the four-layer semiconductor device in accordance with the present disclosure, an electrical insulation is provided that extends at least partially inside the epitaxial layer and that prevents a current from flowing between the first device terminal and the second device terminal that does not at least partially flow through the semiconductor substrate.