SCR Layout for Uniform Triggering in Compact ESD Protection

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Solution Overview

Problem

Silicon controlled rectifiers (SCRs) are inadequate in providing effective Electrostatic Discharge (ESD) protection, particularly in compact designs, as they are susceptible to damage from ESD events and unwanted voltage pulses, which can occur during device production and operation, potentially harming sensitive electronic components.

Innovation Solution

The design of a silicon controlled rectifier with specific surface contact areas and conductivity types, including well regions and trigger regions, that are electrically connected to form transistors, allowing for improved uniformity in SCR triggering and scalability, thereby enhancing ESD protection and preventing current filamentation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional SCR designs are used, then device simplicity is maintained, but ESD protection effectiveness deteriorates due to susceptibility to damage from ESD events and voltage pulses

Engineering Contradiction:
ImproveESD protection effectivenessVSAvoidSCR structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The SCR is segmented into multiple distinct regions (first SCR region, second SCR region, first well region, second well region) with specific conductivity types arranged in a structured pattern. This segmentation allows each region to perform specific functions in the ESD protection mechanism while maintaining overall device reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the SCR are assigned different conductivity types (n-type and p-type) and doping characteristics to create local variations in electrical properties. The first and second well regions have different overlap relationships with the SCR regions, creating localized areas with different base resistance values to prevent current filamentation and improve triggering uniformity.

Inventive Principle:
Principle #3Local quality

2Area of stationary object

If compact SCR design is implemented, then chip area is minimized, but triggering uniformity deteriorates due to reduced space for proper region configuration

Engineering Contradiction:
Improvechip areaVSAvoidtriggering uniformity
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The patent utilizes vertical stacking of regions (first SCR region over first well region, second SCR region over second well region) in addition to lateral arrangement. This three-dimensional configuration allows compact chip area while maintaining sufficient spacing and overlap for uniform triggering. The vertical dimension provides additional design space to achieve proper base resistance values without increasing chip footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The well regions are nested within or adjacent to the SCR regions, with the first well region positioned to overlap the first SCR region and the second well region positioned to overlap the second SCR region. This nesting arrangement allows multiple functional regions to occupy overlapping or adjacent spaces efficiently, achieving compact design while maintaining triggering uniformity through controlled overlap.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Speed

If base resistance is reduced for faster response, then response speed improves, but current filamentation increases causing localized failures

Engineering Contradiction:
Improveresponse speedVSAvoidresistance to current filamentation
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent carefully controls the base resistance parameter by adjusting the overlap between well regions and SCR regions. The first base resistance (between first SCR region and first well region) and second base resistance (between second SCR region and second well region) are optimized to achieve the desired balance between response speed and current filamentation resistance. This parameter optimization allows fast response while preventing localized failures.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS11869885B2Silicon controlled rectifier
Publication Date: 2024.01.09 INFINEON TECHNOLOGIES AG
  • US11869885B2 patent drawing
  • US11869885B2 patent drawing
  • US11869885B2 patent drawing

AI summary

A silicon-controlled rectifier (SCR) includes a semiconductor body including a first main surface, an active device region, a first, a second, a third and a fourth surface contact area at the first main surface and arranged directly one after another along a first lateral direction, wherein the semiconductor body is electrically contacted at each of the first to fourth surface contact areas, and a first, a second, a third and a fourth SCR region, wherein the first and third SCR regions are of a first conductivity type and directly adjoin the first and third surface contact areas, respectively, and wherein the second and fourth SCR regions are of a second conductivity type and directly adjoin the second and fourth surface contact areas, respectively, wherein the first SCR region is electrically connected to the fourth SCR region, and the second SCR region is electrically connected to the third SCR region.