Semiconductor Seal Ring Noise Immunity via Series LC Filter
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Solution Overview
Problem
Modern integrated circuits with analog/RF blocks are prone to noise interference from digital blocks, necessitating enhanced noise immunity, particularly in semiconductor devices with seal ring structures.
Innovation Solution
Incorporating a series inductor and capacitor connected between the seal ring and ground, with multiple sets of these components and strategically placing them near noise-sensitive components, along with resistors, to improve noise immunity and isolation bandwidth.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a seal ring structure is used in semiconductor devices, then device isolation and structural integrity are improved, but noise coupling between digital and analog/RF blocks increases
Solution Approach 1:
The patent introduces an intermediary circuit connected between the seal ring and ground that acts as a noise filter. This intermediary structure (comprising resistors, capacitors, and inductors) mediates the interaction between the seal ring and ground, blocking noise propagation while preserving the seal ring's structural isolation function.
Solution Approach 2:
The patent extracts the noise filtering function from the seal ring structure itself and implements it through a separate connected circuit. By taking out the noise mitigation function and implementing it independently through an external circuit connected to the seal ring, the original seal ring structure maintains its structural integrity while the extracted noise filtering circuit handles electromagnetic interference.
2Reliability
If noise filtering circuits are added to enhance noise immunity, then noise immunity and isolation bandwidth are improved, but device complexity increases
Solution Approach 1:
The patent applies local quality by implementing noise filtering only at specific critical locations where noise coupling occurs through the seal ring, rather than throughout the entire device. The filtering circuit is locally connected to the seal ring at strategic points, providing noise immunity precisely where needed without unnecessarily complicating the entire device architecture.
Solution Approach 2:
The patent utilizes parameter changes by employing passive components (resistors, capacitors, inductors) with specific values that can be optimized for different frequency ranges. By adjusting these component parameters, the filtering circuit can be tuned to target specific noise frequencies, achieving effective noise immunity through parameter optimization rather than complex active circuitry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly enhances noise immunity and isolation bandwidth, particularly in specific frequency bands (1 GHz-15 GHz), reducing noise coupling and improving the performance of noise-sensitive blocks.
Implementation Method 1
Incorporating a series inductor and capacitor connected between the seal ring and ground, with multiple sets of these components and strategically placing them near noise-sensitive components, along with resistors, to improve noise immunity and isolation bandwidth
Data Source
AI summary
According to an exemplary embodiment, a semiconductor device is provided. The semiconductor device includes a first seal ring and a first circuit. The first circuit includes a first capacitor and a first inductor connected in series. The first circuit is connected between the first seal ring and a ground.