Segmented Electrode Sensing Device Stray Capacitance
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Solution Overview
Problem
Current optical sensing devices face challenges in enhancing sensitivity due to high stray capacitance and complex manufacturing processes, which affect the quantum efficiency and photoelectric conversion efficiency of the sensing elements.
Innovation Solution
The design incorporates a substrate with a first and second electrode, where the second electrode includes a first aperture overlapping with the sensing element, and the electrode design minimizes stray capacitance by integrating structures and reducing the equivalent capacitance, thereby simplifying the manufacturing process and improving sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional electrode structures are used in sensing devices, then the manufacturing process is simpler, but the stray capacitance is high which reduces sensitivity
Solution Approach 1:
The second electrode is divided into multiple segments with apertures between them, allowing light to pass through to the sensing element while reducing the continuous conductive area. This segmentation reduces stray capacitance between electrodes while maintaining electrical connectivity through the segments, thereby improving sensitivity without excessive structural complexity
Solution Approach 2:
The electrode structure implements local quality by having different regions with different properties - the electrode material provides conductivity in contact regions while creating apertures in specific locations to allow light transmission. This localized differentiation reduces capacitance in critical areas while maintaining overall electrode functionality
2Reliability
If complex manufacturing processes are used to reduce capacitance, then sensitivity improves, but the manufacturing complexity increases
Solution Approach 1:
The electrode pattern and aperture structure are merged into a single integrated component rather than being separate elements. The second electrode simultaneously serves as both the electrical contact element and the light-blocking element with built-in apertures, combining multiple functions into one manufacturing step and simplifying the overall manufacturing process while achieving reduced capacitance
3Reliability
If the second electrode is made continuous to ensure electrical connectivity, then conductivity is maintained, but stray capacitance increases reducing photoelectric conversion efficiency
Solution Approach 1:
The second electrode is segmented into discrete conductive regions separated by apertures, breaking the continuous conductive path into segments. This segmentation reduces the total capacitance between the second electrode and other electrodes while maintaining sufficient electrical connectivity through the distributed segments, thereby improving photoelectric conversion efficiency
Solution Approach 2:
The apertures in the second electrode act as intermediaries that allow light to pass through to the sensing element while the electrode segments provide the necessary electrical connectivity. This intermediary structure enables both optical transmission and electrical function simultaneously with reduced capacitance interference
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the sensitivity and overall performance of the sensing device by reducing equivalent capacitance and simplifying the manufacturing process, leading to improved quantum efficiency and photoelectric conversion efficiency.
Implementation Method 1
The sensing element in an optical sensing device converts received light into an electrical signal
Data Source
AI summary
A sensing device is provided. The sensing device includes a substrate, a first electrode, a sensing element and a second electrode. The first electrode is disposed on the substrate. The sensing element is disposed on the first electrode. The sensing element is electrically connected to the first electrode. The sensing element includes a plurality of sensing units that are separate from each other. The second electrode is disposed on the sensing element and is electrically connected to the plurality of sensing units. In addition, at least one of the first electrode and the second electrode includes a hollow area, and the hollow area overlaps with a pitch between the plurality of sensing units. A method for manufacturing a sensing device is also provided.