Segmented Insulation for Ion Implantation Conductors

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Solution Overview

Problem

The existing insulated conductor designs for voltage structures in ion implantation devices face challenges in manufacturing, installation, maintenance, cost, and reliability due to their large size and complexity, particularly with single-piece insulators.

Innovation Solution

The use of multiple insulation segments interfacing with each other, each enclosing a conductor, which are positioned in proximity to create an equi-potential line similar to a continuous conductor, effectively redistributing electrical stress onto the insulation material and reducing the risk of electrical breakdown.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single continuous insulator is used to enclose the conductor, then the electrical stress shielding is effective, but the manufacturing complexity and installation difficulty increase significantly

Engineering Contradiction:
Improveelectrical stress shielding effectivenessVSAvoidmanufacturing and installation complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The insulator is divided into multiple discrete segments that can be manufactured separately and then assembled around the conductor. Each segment is inscribed with conductive material to maintain electrical stress shielding continuity. This segmentation reduces manufacturing complexity while maintaining the effectiveness of the electrical stress shielding.

Inventive Principle:
Principle #1Segmentation

2Reliability

If a single large insulator is used, then complete enclosure is achieved, but maintenance and replacement become difficult and costly

Engineering Contradiction:
Improvecomplete electrical enclosureVSAvoidmaintenance and replacement ease
Core Design Contradiction:
ReliabilityVSEase of repair

Solution Approach 1:

The insulator is divided into multiple discrete segments that can be manufactured separately and then assembled around the conductor. Each segment is inscribed with conductive material to maintain electrical stress shielding continuity. This segmentation reduces manufacturing complexity while maintaining the effectiveness of the electrical stress shielding.

Inventive Principle:
Principle #1Segmentation

3Ease of manufacture

If multiple insulation segments are used, then manufacturing and installation become easier, but the continuity of equi-potential lines may be compromised

Engineering Contradiction:
Improvemanufacturing and installation easeVSAvoidequi-potential line continuity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The conductive material is applied locally to the interface regions between insulator segments where electrical stress concentration occurs. This localized treatment ensures that the equi-potential lines remain continuous at the critical interface regions while allowing the bulk of the insulator segments to be simple and easy to manufacture.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enhances the reliability and reduces manufacturing and maintenance costs by allowing for easier installation and improved stress distribution, thereby preventing electrical breakdowns and improving the overall performance of the insulated conducting device.

Implementation Method 1

The use of multiple insulation segments interfacing with each other, each enclosing a conductor, which are positioned in proximity to create an equi-potential line similar to a continuous conductor, effectively redistributing electrical stress onto the insulation material and reducing the risk of electrical breakdown.

Methodology Applied
Scientific EffectElectrical stress distribution: Dielectric

Data Source

PatentUS7799999B2Insulated conducting device with multiple insulation segments
Publication Date: 2010.09.21 VARIAN SEMICON EQUIP ASSC INC
  • US7799999B2 patent drawing
  • US7799999B2 patent drawing
  • US7799999B2 patent drawing

AI summary

Insulated conducting devices and related methods are disclosed. An insulated conducting device for a voltage structure comprises: a conductor connected to a voltage; and multiple insulation segments enclosing the conductor, the multiple insulation segments interfacing with one another.