Segmented Plasma Antenna Structure for Stable Large-Area Induction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional inductively coupled plasma generating devices face instability in plasma control and reduced durability due to factors like pressure, gas type, power applied, current, voltage, and power consumption, especially as the device size increases.
Innovation Solution
An antenna structure with multiple segments and capacitive elements is used to generate plasma, featuring a specific arrangement of antenna segments with different radii of curvature and capacitive loads to distribute voltage safely and induce plasma effectively. Additionally, a coolant channel is integrated into the antenna structure to absorb heat generated during plasma induction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the antenna structure uses a simple conventional design, then the device structure is simple, but plasma control stability deteriorates and device durability is reduced
Solution Approach 1:
The antenna is divided into multiple segments (first antenna segment, second antenna segment, third antenna segment, fourth antenna segment) with different radius of curvature values. This segmentation allows each segment to contribute differently to the overall electric field distribution, improving plasma control stability while managing structural complexity through modular design.
Solution Approach 2:
Each antenna segment is assigned a different radius of curvature (first radius of curvature, second radius of curvature, third radius of curvature, fourth radius of curvature) to create localized variations in electric field intensity. This local quality differentiation enables precise control of plasma generation at different spatial locations, enhancing overall plasma control stability.
2Area of stationary object
If the device volume or area is increased to generate plasma in large area, then plasma generation area is improved, but plasma control stability and device durability deteriorate
Solution Approach 1:
The antenna structure is segmented into multiple sections extending in the radial direction, with each segment having different geometric parameters (radius of curvature, length). This allows the antenna to cover a large area while maintaining controlled electric field distribution across the entire plasma generation region, preventing the deterioration of plasma control stability that would normally occur with large-scale devices.
3Productivity
If high voltage is applied to generate plasma at high driving frequency or large input current, then plasma generation effectiveness is improved, but voltage distribution becomes unsafe and device damage risk increases
Solution Approach 1:
The antenna is divided into multiple segments connected in series, which distributes the total applied voltage across different segments. This segmentation prevents concentration of high voltage at any single point, enabling safe operation at high driving frequencies and large input currents while maintaining effective plasma generation.
Solution Approach 2:
Each antenna segment has different electrical characteristics determined by its specific radius of curvature and length, creating localized voltage distribution patterns. This allows the system to handle high overall voltage by distributing it safely across segments with optimized local properties, preventing breakdown and device damage.
4Productivity
If plasma is induced using conventional antenna, then plasma generation is achieved, but heat generation causes device damage
Solution Approach 1:
A coolant channel is introduced as an intermediary element between the antenna and the environment. This coolant channel acts as a heat dissipation pathway, allowing efficient removal of heat generated during plasma induction without interfering with the plasma generation process itself, thus preventing device damage from thermal accumulation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The antenna structure effectively reduces the maximum voltage applied to the antenna, maintains plasma for a longer time, reduces energy loss, and enables large area plasma generation, while the coolant channel prevents thermal damage to the plasma generating device.
Implementation Method 1
a device which induces plasma generation by generating an induced electric field and an induced magnetic field using an antenna structure
Implementation Method 2
a first capacitive load, electrically connecting the first antenna segment and the second antenna segment in series
Implementation Method 3
a plasma generating device for preventing damage to a plasma generating device due to heat generated when plasma is induced
Data Source
AI summary
This invention is an antenna structure inducing plasma in a chamber with applied alternative power, comprising: a first antenna segment and a second antenna segment arranged based on a virtual central axis to have a first curvature radius and a second curvature radius respectively, the central axis crossing a first plane, and a first capacitive load electrically connecting the first antenna segment and the second antenna segment, wherein the first antenna segment extends from one end of the first capacitive load with the first curvature radius having a first length and the second antenna segment extends from other end of the first capacitive load with the second curvature radius having a second length, and wherein a sum of the first length and the second length is shorter than a circumference of the first curvature radius or the second curvature radius.