Segmented Probe Body Reduces Contact Force

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Solution Overview

Problem

Existing probe systems face challenges in meeting the requirements of high-frequency/high-speed testing and high-current testing due to the increased rigidity of probes, which can lead to excessive force on contact pads and potential damage to electronic devices under test.

Innovation Solution

The proposed probe system incorporates a multilayer structure with a body portion that has a wide edge and a thick edge, where the length of the probe is greater than its thickness, and the body portion features a plurality of layers separated along the wide edge and divided by at least one slit, effectively reducing the overall rigidity of the probe.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If the probe length is shortened to improve high-frequency/high-speed signal transmission, then signal transmission quality is improved, but probe rigidity increases causing excessive force on contact pads

Engineering Contradiction:
Improvesignal transmission speedVSAvoidaction force on contact pad
Core Design Contradiction:
SpeedVSForce

Solution Approach 1:

The probe body is divided into multiple layers (first layer, second layer, third layer) separated by slits, creating a segmented structure that reduces overall rigidity while maintaining electrical conductivity and signal transmission capabilities

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe employs different structural characteristics in different regions: the head portion maintains sufficient rigidity for reliable contact, while the body portion uses a multilayer slit structure to reduce rigidity and minimize force on the contact pad

Inventive Principle:
Principle #3Local quality

2Power

If the probe thickness is increased to improve high-current transmission capability, then current transmission is improved, but probe rigidity increases causing excessive force on contact pads

Engineering Contradiction:
Improvecurrent transmission capabilityVSAvoidaction force on contact pad
Core Design Contradiction:
PowerVSForce

Solution Approach 1:

The thick probe body is segmented into multiple layers with slits, which distributes the mechanical stress and reduces overall rigidity while preserving the thick cross-section needed for high-current transmission

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The probe employs a composite structure combining conductive materials for current transmission with a multilayer slit design that provides mechanical flexibility, achieving both high-current capability and reduced contact force

Inventive Principle:
Principle #40Composite materials

3Strength

If the probe rigidity is increased to improve mechanical strength, then structural strength is improved, but electrical performance for high-speed testing deteriorates

Engineering Contradiction:
Improvemechanical strengthVSAvoidhigh-speed signal transmission
Core Design Contradiction:
StrengthVSSpeed

Solution Approach 1:

The multilayer structure with slits creates a flexible yet strong probe body that can maintain mechanical integrity while being flexible enough for high-speed signal transmission and impedance matching

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20250172589A1Probe system, probe card, probe head, and probe for testing electronic device under test integrated on a semiconductor wafer, and electronic device under test tested by the probe card
Publication Date: 2025.05.29 MPI CORP
  • US20250172589A1 patent drawing
  • US20250172589A1 patent drawing
  • US20250172589A1 patent drawing

AI summary

A probe head includes multiple probes and upper and lower guide plates. The probes pass through the upper and lower guide plates and include head, tail, and body portions. The head includes a contact area for contacting the contact pads on the DUT during testing. The body is located between the head and tail and extends along a longitudinal development axis. The transverse cross-section of the body is perpendicular to the longitudinal development axis and has a wide edge and a thick edge. The wide and thick edges represent the width and thickness of the body, respectively. The length of each probe is greater than the thickness of the body. The body has a multilayer structure, in which multiple layers are separated along the wide edge, and at least one slit divides these layers, with the thickness of the body being greater than or equal to its width.