Segmented Pulse Generator Topology for High-Voltage Capacitive Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver pulsed high power with high voltage and/or high current to capacitive loads, particularly in plasma processes, due to voltage handling limitations of semiconductor switches, especially during high-frequency operations.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, connected in a coupling configuration, where a control unit selectively activates LP-generators to achieve a step-function output without continuous slope, allowing for efficient power delivery and voltage transitions, using balancing and damping circuits to manage charge distribution and prevent overcharging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and high current pulses, then the power delivery capability is improved, but the voltage handling capability of semiconductor switches deteriorates
Solution Approach 1:
The patent divides the high-power generator into multiple low-power generators (LP-generators), each capable of handling lower voltages individually. These LP-generators are connected in series through a coupling circuit, allowing their voltages to add up to achieve the required high output voltage. This segmentation resolves the contradiction by enabling high power delivery through multiple units while each unit's semiconductor switches operate within their safe voltage handling limits.
2Reliability
If multiple low-power generators are connected in series to achieve high voltage, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
The patent employs identical LP-generator modules that can be replicated and connected in series. Each module has the same structure and components, making them universally interchangeable. This modular approach simplifies the overall system design and maintenance while achieving the required high voltage capability, as each module performs the same function and can be independently tested and replaced.
Solution Approach 2:
The coupling circuit acts as an intermediary between the multiple LP-generators, providing the necessary electrical connections and coordination. This intermediary component manages the series connection of the generators, enabling their voltages to combine while maintaining system simplicity through a standardized interface and control mechanism.
3Shape
If LP-generators are activated sequentially to form a step-function output, then the voltage transition sharpness is improved, but the pulse formation time increases
Solution Approach 1:
The patent uses periodic switching of the LP-generators to create a step-function output waveform. Each LP-generator is activated in sequence at specific time intervals, creating discrete voltage steps that form the desired pulse shape. This periodic activation pattern allows sharp voltage transitions while maintaining controlled pulse formation time through optimized switching frequencies and duty cycles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables efficient and reliable delivery of high-power pulses with sharp voltage transitions, reducing power losses and voltage overshoots, and effectively managing charge distribution across LP-generators, thus addressing the limitations of existing technologies in plasma processes.
Implementation Method 1
each LP-generator comprising an energy storage component, wherein in use the energy storage component is charged to a predefined value related to the energy storage component
Implementation Method 2
a balancing circuit comprising a component allowing current flow in one direction only, in particular a diode or component working like a diode, is connected between two LP-generators
Data Source
Figure 1
Figure 2a~2b
Figure 3
AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), o each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, o each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - wherein a balancing circuit comprising a component allowing current flow in one direction only, in particular a diode (D) or component working like a diode, is connected between two LP-generators (14, 16, 18).