Segmented Pupil Plane Defect Detection via Selective Filtering
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Solution Overview
Problem
Inspection systems face challenges in distinguishing between pixels with satisfactory and non-satisfactory signal-to-noise ratios (SNR) in real-time, affecting sensitivity and defect detection accuracy.
Innovation Solution
The system employs a segmented pupil plane with multiple segments, where first detection channels select and process radiation from segments of interest, and configurable filters are used to pass radiation from these segments while blocking non-interest segments, enabling a partially masked pupil plane inspection process for enhanced sensitivity and defect detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If simultaneous inspection through segmented pupil plane is performed to identify regions of interest, then defect detection sensitivity is improved, but device complexity increases due to multiple detection channels and configurable filters
Solution Approach 1:
The pupil plane is divided into multiple segments, each corresponding to different regions of the sample. Detection channels are configured to selectively inspect specific pupil plane segments, allowing the system to focus computational and detection resources on regions with satisfactory SNR while reducing overall system complexity through targeted inspection.
Solution Approach 2:
The inspection system dynamically configures detection channels and configurable filters based on real-time identification of pupil plane segments of interest. The system adapts its inspection strategy by selectively activating detection channels corresponding to high-SNR regions, optimizing defect detection sensitivity while managing device complexity through dynamic resource allocation.
2Measurement precision
If configurable filters are used to block radiation from non-interest pupil plane segments, then signal to noise ratio is improved, but loss of information occurs by blocking radiation from certain regions
Solution Approach 1:
The system extracts and processes only the radiation from pupil plane segments of interest while blocking radiation from non-interest segments. By identifying and isolating the useful signal portions (high-SNR regions), the system improves SNR without significant information loss, as the blocked regions contribute minimal useful information.
Solution Approach 2:
Different regions of the pupil plane are treated differently based on their local quality characteristics. Regions with satisfactory SNR are selected for detailed inspection while regions with poor SNR are blocked. This local quality approach optimizes the overall SNR by applying selective filtering based on the specific characteristics of each pupil plane segment.
3Productivity
If selective inspection of pupil plane segments is performed, then inspection speed is improved, but measurement precision may be reduced by inspecting only selected regions
Solution Approach 1:
The system performs preliminary identification of pupil plane segments of interest before conducting detailed defect inspection. By pre-selecting high-SNR regions that are most likely to contain detectable defects, the system accelerates the inspection process while maintaining measurement precision through targeted analysis of the most informative regions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases the sensitivity of defect detection by selectively focusing on regions with adequate SNR, blocking radiation from unsatisfactory regions, and tailoring the inspection process for improved light processing and defect identification.
Implementation Method 1
collection optics that are configured to collect radiation emitted from the sample due to the illuminating of the sample
Implementation Method 2
configure one or more configurable filters related to second detection channels to pass radiation received from the one or more pupil plane segment of interest and to block radiation received from one or more non-of-interest pupil plane segments
Data Source
AI summary
A method for high throughput defect detection, the method may include (i) performing, using first detection channels, a simultaneous inspection process through a segmented pupil plane that comprises multiple pupil plane segments to select one or more pupil plane segments of interest out of multiple pupil plane segments; (ii) configuring one or more configurable filters related to second detection channels to pass radiation received from the one or more pupil plane segment of interest and to block radiation received from one or more non-of-interest pupil plane segments; and (iii) performing, using the second detection channels, a partially masked pupil plane inspection process.