Surface Inspection with Selectable Laser Line Widths

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Solution Overview

Problem

Conventional laser triangulation systems for surface inspection face challenges such as slowed measurement procedures and reduced accuracy when measuring small surface features due to the need for smaller spot sizes or narrower laser line widths, which increase the number of points to be analyzed.

Innovation Solution

The system employs a selectable laser spot size or laser line width that can cover a larger area of the surface under test, allowing for increased scanning speed and improved measurement throughput. This is achieved by using multiple lasers with varying linewidths and aligning a sensor matrix to collect light reflections from surface features as they move through the interrogating beam.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the laser spot size or laser line width is minimized to improve spatial resolution, then measurement precision is improved, but productivity deteriorates due to slower measurement procedures and increased number of points to be analyzed

Engineering Contradiction:
Improvespatial resolutionVSAvoidmeasurement speed
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The system dynamically adjusts the laser line width based on the measurement requirements and surface feature characteristics. The controller can select from multiple pre-configured laser line widths (e.g., narrow, medium, wide) to optimize the balance between spatial resolution and measurement speed for different inspection scenarios.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the physical parameter of laser line width to resolve the contradiction. By providing multiple laser sources with different line widths or dynamically adjusting the laser line width, the system can switch between narrow lines for high precision measurements and wide lines for faster scanning, thereby adapting to different productivity and precision requirements.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If the laser spot size or laser line width is minimized to improve spatial resolution, then measurement precision is improved, but the number of points to be analyzed increases, worsening device complexity

Engineering Contradiction:
Improvespatial resolutionVSAvoidnumber of points to be analyzed
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The system dynamically adjusts the laser line width based on the measurement requirements and surface feature characteristics. The controller can select from multiple pre-configured laser line widths (e.g., narrow, medium, wide) to optimize the balance between spatial resolution and measurement speed for different inspection scenarios.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the physical parameter of laser line width to resolve the contradiction. By providing multiple laser sources with different line widths or dynamically adjusting the laser line width, the system can switch between narrow lines for high precision measurements and wide lines for faster scanning, thereby adapting to different productivity and precision requirements.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If a smaller laser spot size is used to measure small surface features, then measurement precision is improved, but measurement speed decreases due to transitional periods as the laser line moves up and down side surfaces

Engineering Contradiction:
Improveaccuracy in measuring small featuresVSAvoidmeasurement procedure time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system dynamically adjusts the laser line width based on the measurement requirements and surface feature characteristics. The controller can select from multiple pre-configured laser line widths (e.g., narrow, medium, wide) to optimize the balance between spatial resolution and measurement speed for different inspection scenarios.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent changes the physical parameter of laser line width to resolve the contradiction. By providing multiple laser sources with different line widths or dynamically adjusting the laser line width, the system can switch between narrow lines for high precision measurements and wide lines for faster scanning, thereby adapting to different productivity and precision requirements.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables faster measurement procedures and improved accuracy in analyzing small surface features by reducing the number of images needed to cover a given physical space, thus enhancing the overall measurement throughput of the surface inspection system.

Implementation Method 1

Conventional surface inspection systems, often referred to as profile sensors, use a laser triangulation principle for three-dimensional profile detection on surfaces under test

Methodology Applied
Scientific EffectLaser triangulation: LIDAR

Implementation Method 2

Diffuse or specular reflections from surface feature are directed onto a sensor matrix in a camera

Methodology Applied
Scientific EffectLight reflection: Reflection

Data Source

PatentUS20250290871A1Surface inspection system
Publication Date: 2025.09.18 ONTO INNOVATION INC
  • US20250290871A1 patent drawing
  • US20250290871A1 patent drawing
  • US20250290871A1 patent drawing

AI summary

A surface inspection system can be provided with a laser spot size or a laser line width that is selectable based on a measurable aspect of the objects under test that project upward or downward from a surface under test. The larger laser spot size or line width can be selected to cover a larger area of the surface under test at a time, which can increase scanning speed over the surface under test and enhance system measurement throughput.