SEM Aperture Array with Ultra-Thin Membrane for Non-Vacuum Imaging
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Solution Overview
Problem
Current Scanning Electron Microscopes (SEMs) face challenges in determining the working distance in non-vacuum environments, which is crucial for resolution and contrast optimization, while maintaining a balance to prevent contamination and ensure focused imaging.
Innovation Solution
A method and system that uses an electron beam generated in a vacuum environment, passing through an aperture array sealed by an ultra-thin membrane, which withstands pressure differences, to scan objects in a non-vacuum environment, allowing for detection of particles and determination of the working distance without contacting the microscope optics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the working distance is reduced to improve resolution and contrast, then image quality improves, but the risk of contamination to microscope optics increases
Solution Approach 1:
A membrane structure is introduced as an intermediary between the object and the microscope optics. This membrane allows electron beams to pass through while physically preventing direct contact between the object and optics, thus enabling small working distances without contamination risk.
Solution Approach 2:
A thin membrane is used to seal the interface between vacuum and non-vacuum environments. The membrane is thin enough to be transparent to electron beams while providing physical separation to prevent contamination, resolving the contradiction between close proximity for high resolution and separation for contamination prevention.
2Object-affected harmful factors
If the working distance is increased to prevent contamination, then contamination risk decreases, but image resolution and contrast deteriorate
Solution Approach 1:
The membrane acts as a mediator that enables the system to maintain small working distances while preventing contamination. Without this intermediary, the system would need to increase working distance to avoid contamination, which would degrade image quality.
3Ease of operation
If the object is placed in a non-vacuum environment to allow real-time imaging and manipulation, then ease of operation improves, but determining accurate working distance becomes more difficult
Solution Approach 1:
The system performs preliminary actions by generating test electron beams and detecting scattered particles before final imaging. This preliminary measurement phase allows accurate determination of working distance and focal plane in the non-vacuum environment, enabling subsequent high-quality imaging.
Solution Approach 2:
The system uses feedback from particle detection to determine working distance and adjust focusing. By measuring scattered electron particles and using this information to adjust the electron beam focus, the system achieves accurate working distance determination despite the non-vacuum environment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient determination of the working distance, reducing contamination risks and maintaining high image resolution and contrast, even for non-solid objects like gels and biological cells, while allowing for real-time imaging and manipulation of samples in various environments.
Implementation Method 1
detecting particles generated in response to an interaction between the electron beam and the object
Implementation Method 2
wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment
Data Source
AI summary
An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.