Combined SEM-CL and FIB-IOE Microscopy System
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Solution Overview
Problem
Scanning-electron-microscope-cathodoluminescence (SEM-CL) microscopy is limited by its spatial resolution and lack of elemental analysis capability, necessitating improved techniques for enhanced analysis of solids.
Innovation Solution
A combined SEM-CL and FIB-IOE microscopy system that includes an ion beam source, an electron beam source, and a reflector with apertures to switch between microscopy modes, allowing for dual beam operation and shared light detection, enabling 2D/3D elemental analysis and improved spatial resolution through coincident beam geometry.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If SEM-CL microscopy is used, then information about trace elements and mechanically induced defects can be obtained, but spatial resolution is limited and elemental analysis capability is lacking
Solution Approach 1:
The patent combines SEM-CL microscopy and FIB-IOE microscopy into a single integrated system that can perform both cathodoluminescence imaging and ion-induced optical emission spectroscopy. The shared optical path, reflector, and detection system allow simultaneous or sequential operation of both techniques, thereby improving spatial resolution through FIB-IOE while maintaining elemental analysis capability through the combined system.
Solution Approach 2:
The microscopy system is designed with multi-functionality to perform multiple analysis techniques including SEM-CL imaging, FIB-IOE spectroscopy, and elemental analysis. The system can switch between different beam modes (electron beam for SEM-CL, ion beam for FIB-IOE) and detection modes, making it universally applicable for various material characterization needs without requiring separate instruments.
2Measurement precision
If a reflector is added to collect and reflect light from the sample, then light detection efficiency is improved, but device complexity increases
Solution Approach 1:
The reflector is designed to serve multiple functions: it collects light from the sample during both SEM-CL and FIB-IOE operations, reflects light to the detection system, and allows passage of both electron beams and ion beams through apertures. This multi-functional design improves light detection efficiency while minimizing the addition of separate components, thereby controlling system complexity.
Solution Approach 2:
The reflector incorporates apertures that segment the structure to allow selective passage of electron beams and ion beams while maintaining the reflective surface for light collection. This segmentation enables the reflector to perform beam transmission and light reflection functions simultaneously without requiring separate components, reducing overall system complexity.
3Adaptability or versatility
If dual beam operation is implemented, then both electron beam and ion beam can be used for comprehensive analysis, but device complexity and operational complexity increase
Solution Approach 1:
The system integrates both electron beam source and ion beam source into a single microscopy platform with shared optical components including the reflector and detection system. This universal design allows comprehensive analysis using both beam types while avoiding the need for completely separate instruments, thereby improving adaptability while controlling device complexity through component sharing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enhances spatial resolution and enables comprehensive elemental analysis, overcoming the limitations of SEM-CL by integrating FIB-IOE capabilities, allowing for detailed imaging and analysis of samples.
Implementation Method 1
scanning-electron-microscope-cathodoluminescence (SEM-CL) microscopy
Implementation Method 2
focused-ion-beam ion-induced optical emission (FIB-IOE) microscopy
Implementation Method 3
the reflector is shaped to receive light emitted from a sample at the sample location resulting from an interaction between the sample and either the ion beam or the electron beam; the reflector is further shaped to reflect the light to a light detection system
Data Source
AI summary
Disclosed herein are example embodiments for performing microscopy using microscope systems that combine both scanning-electron-microscope-cathodoluminescence (SEM-CL) microscopy and focused-ion-beam ion-induced optical emission (FIB-IOE) microscopy. Certain embodiments comprise operating a microscopy system in a first microscopy mode in which an electron beam interacts with a sample at a sample location and causes first-mode photons and electrons to be emitted, the first-mode photons including photons generated through a cathodoluminescence process; and operating a microscopy system in a second microscopy mode in which an ion beam interacts with a sample at the sample location and causes second-mode photons to be emitted, the second-mode photons including photons generated through an ion-induced luminescence process and photons generated through an atomic de-excitation process.