SEM Ring Reflector for Simultaneous Electron and Photon Detection
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Solution Overview
Problem
Current scanning electron microscopes face limitations in collecting cathode fluorescence signals due to the small receiving space angle and low collection efficiency of side-type detectors, which also block the path of reflection electrons, preventing simultaneous detection of cathode fluorescence and reflection electrons.
Innovation Solution
A scanning electron microscope design incorporating a ring-shaped reflector positioned above the specimen to reflect photons onto a photon detector, enhancing photon collection efficiency and allowing for simultaneous detection of backscattered electrons and cathode fluorescence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a side-type cathode fluorescence detector is used, then cathode fluorescence detection is achieved, but the receiving space angle is small and collection efficiency is low
Solution Approach 1:
The patent transitions from a side-type detector configuration to a top-type detector arrangement positioned above the specimen. This dimensional change allows the detector to receive cathode fluorescence photons from multiple angles simultaneously, significantly increasing the receiving space angle and collection efficiency while maintaining detection capability.
Solution Approach 2:
The patent employs a ring-shaped reflector with curved reflective surfaces positioned around the specimen. This curved geometry is designed to collect and redirect cathode fluorescence photons from various angles toward the detector, maximizing the collection solid angle and improving detection efficiency through optimized optical path design.
2Measurement precision
If a side-type cathode fluorescence detector is used, then cathode fluorescence can be detected, but the path of reflection electrons is blocked
Solution Approach 1:
The patent positions the cathode fluorescence detector above the specimen in the vertical dimension, while electron detectors are arranged in the horizontal plane. This spatial separation in different dimensions allows simultaneous detection of both cathode fluorescence and reflection electrons without mutual interference or path blocking.
Solution Approach 2:
The patent divides the detection system into separate detector modules with distinct detection paths: one module for cathode fluorescence photons and another for reflection electrons. This segmentation allows each detector type to operate independently with optimized detection angles, enabling simultaneous multi-signal detection without cross-interference.
3Measurement precision
If a side-type cathode fluorescence detector is used, then cathode fluorescence detection is implemented, but the footprint is relatively large
Solution Approach 1:
The patent repositions the cathode fluorescence detector from a lateral arrangement to a vertical arrangement above the specimen. This dimensional reconfiguration reduces the horizontal footprint of the detection system while maintaining effective detection through the optimized top-type geometry and ring-shaped reflector design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves wide-range photon collection and high reception efficiency, enabling the simultaneous detection of cathode fluorescence and backscattered electrons with improved detection capabilities.
Implementation Method 1
The reflector is in a ring shape and is arranged to cover the perimeter of the specimen. The reflector reflects the photons generated on the specimen onto the photon detector.
Implementation Method 2
a cathode fluorescence signal generated by electron beams acting on a specimen is an electromagnetic wave in ultraviolet, infrared or visible spectra, emitted when the electron beams bombard the surface of the specimen
Implementation Method 3
during the energy releasing, part of the energy is emitted in the form of electromagnetic radiation
Data Source
AI summary
A scanning electron microscope includes: an electron optical column, arranged to generate electron beams and focus the electron beams on a specimen; a first detector, arranged to receive electrons generated by the electron beams acting on the specimen; and a second detector, arranged to receive photons generated by the electron beams acting on the specimen. The second detector includes a reflector and a photon detector. The reflector is in a ring shape and is arranged to cover the perimeter of the specimen. The reflector reflects the photons generated on the specimen onto the photon detector. The scanning electron microscope provided by the present disclosure can collect photons in a wide range, and the photon detector has a high reception efficiency.