Multi-Detector SEM Signal Correction for Artifact-Free Imaging
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Solution Overview
Problem
Multi-beam SEMs face challenges in accurately measuring the intensity of signal electron beams due to spreading and mixing issues when detected by multiple detectors, often resulting in artifacts in the SEM image.
Innovation Solution
A charged particle beam device equipped with a control system that measures and corrects the intensity distribution of signal electron beams using a correction matrix, ensuring each beam is accurately detected and separated by multiple detectors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple detectors are used to detect signal electron beams, then detection coverage is improved, but measurement precision deteriorates due to beam spreading and mixing across detectors
Solution Approach 1:
The detection area is segmented into multiple detectors, with each detector responsible for detecting signal electron beams from specific primary beam irradiation positions. This segmentation allows simultaneous wide-area detection while maintaining precise intensity measurement for each region, resolving the contradiction between detection coverage and measurement precision.
2Adaptability or versatility
If signal electron beams are detected by multiple detectors, then detection capability is improved, but image accuracy deteriorates due to artifacts from beam mixing
Solution Approach 1:
The control system receives detection results from multiple detectors and performs coordinate transformation and image synthesis with feedback mechanisms. This ensures that signal electron beams detected by different detectors are correctly mapped to their corresponding primary beam irradiation positions, preventing artifacts and maintaining image accuracy while utilizing the enhanced detection capability of multiple detectors.
3Ease of manufacture
If intensity distribution is measured without correction, then measurement process is simpler, but manufacturing precision deteriorates due to inaccurate intensity data
Solution Approach 1:
The control system performs preliminary coordinate transformation and intensity distribution correction based on the geometric relationships between detectors and primary beam irradiation positions before image synthesis. This preliminary action ensures accurate intensity distribution data is obtained without complicating the overall measurement process, resolving the contradiction between process simplicity and measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the generation of more accurate SEM images by correcting intensity distributions, preventing artifacts and improving image quality.
Implementation Method 1
a plurality of detectors configured to detect one or more signal charged particle beams caused by irradiation on a sample with one or more primary charged particle beams
Data Source
AI summary
A charged particle beam device includes a plurality of detectors configured to detect one or more signal charged particle beams caused by irradiation on a sample with one or more primary charged particle beams, and a control system. The control system is configured to measure an intensity distribution of the one or more signal charged particle beams detected by the plurality of detectors, and correct the intensity distribution by using a correction function. The control system is configured to generate an image based on the corrected intensity distribution.