SEM Image Processing Control for Storage-Aware Scanning
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Solution Overview
Problem
In conventional charged particle beam microscope systems, when the performance of the image analyzing server decreases due to faults, the image processing fails to keep up with incoming data, leading to insufficient storage space and prolonged measurement or defect detection times for target objects.
Innovation Solution
A charged particle beam microscope image processing system that dynamically adjusts its processing performance based on the operation state, including controlling the scanning performance and image transmission speed to manage storage effectively, ensuring continuous processing and reducing delays.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the SEM scanning speed is increased to improve throughput, then productivity is improved, but the image processing system cannot keep up with data transfer, causing storage space to be depleted and scanning to stop
Solution Approach 1:
The system dynamically adjusts the SEM scanning speed based on real-time monitoring of storage free space and image processing status. When storage free space falls below a threshold or processing is delayed, the scanning speed is automatically reduced to match the processing capability, preventing storage depletion and ensuring continuous operation.
Solution Approach 2:
The control system continuously monitors the storage free space and image processing status, using this feedback information to adjust the scanning speed. This closed-loop control ensures that the scanning throughput adapts to the actual processing capacity, maintaining system reliability while maximizing productivity when possible.
2Productivity
If the image processing speed is increased to handle higher throughput, then productivity is improved, but system complexity increases and reliability decreases when faults occur
Solution Approach 1:
The image processing system dynamically adjusts its processing speed based on monitored performance metrics and fault status. When faults are detected or performance degrades, the system automatically reduces processing speed to prevent overload and maintain stable operation, allowing continuous processing at adaptive rates.
Solution Approach 2:
The system changes processing parameters such as processing speed and data transfer rate based on monitored conditions including fault status and performance metrics. This allows the system to operate reliably across a range of conditions by adjusting parameters to match actual capabilities.
3Productivity
If storage capacity is increased to hold more images, then the system can maintain higher scanning speeds, but device complexity and cost increase
Solution Approach 1:
Instead of using large static storage capacity, the system uses dynamic adjustment of scanning speed based on available storage space. This allows the system to operate efficiently with smaller storage capacity by adapting the scanning rate to match the storage availability and processing capability.
Solution Approach 2:
The system changes the scanning speed parameter in response to storage free space conditions, allowing flexible operation with limited storage capacity. This parameter adaptation eliminates the need for large storage systems while maintaining productivity when storage is available.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively suppresses the lengthening of image processing time by dynamically managing storage and processing performance, preventing scanning interruptions and maintaining efficient defect inspection.
Implementation Method 1
a charged particle beam optical system configured to irradiate a sample with a charged particle beam, and output a detection signal of charged particles from the sample
Data Source
AI summary
A charged particle beam microscope image processing system includes: a charged particle beam optical system configured to irradiate a sample with a charged particle beam, and output a detection signal of charged particles from the sample; and a control and image processing system configured to control the charged particle beam optical system, generate an image of the sample from the detection signal, store the generated image in a storage, and perform analysis processing on the image. The control and image processing system determines a performance of processing the image on the basis of an operation state of the control and image processing system, on the basis of the processing performance, determines a processing performance corresponding to a speed of storing the image into the storage, and generates the image and stores the image into the storage according to the determined processing performance.