Semiconductor Package Anti-Oxidation RDL Structure

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Solution Overview

Problem

Oxidation can adversely affect the performance of semiconductor device packages, particularly by increasing contact resistance and slowing down signal transmission.

Innovation Solution

The semiconductor device package includes a redistribution layer (RDL) structure, conductive pillars, and an anti-oxidation structure to prevent oxidation, ensuring efficient electrical connections and fast signal transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conductive terminals are exposed without protection, then electrical connection is achieved, but oxidation increases contact resistance and degrades performance

Engineering Contradiction:
Improvecontact resistanceVSAvoidoxidation
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent applies preliminary anti-action by forming an anti-oxidation structure on the conductive terminals before oxidation can occur. This protective layer is deposited in advance to prevent the harmful oxidation reaction, thereby maintaining low contact resistance and reliable electrical connections throughout the device's operational life.

Inventive Principle:
Principle #9Preliminary anti-action

Solution Approach 2:

The anti-oxidation structure serves as an intermediary between the conductive terminal and the oxidizing environment. This intermediate layer protects the conductive terminal from direct contact with oxygen, preventing oxidation while still allowing the underlying terminal to maintain its electrical function.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If anti-oxidation structure is added to protect conductive terminals, then oxidation resistance is improved, but device complexity increases

Engineering Contradiction:
Improveoxidation resistanceVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The anti-oxidation structure is applied selectively only to the conductive terminals that require protection, rather than coating the entire device. This localized approach provides necessary oxidation resistance at critical interfaces while minimizing the addition of overall device complexity and material usage.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively mitigates oxidation-related performance issues by maintaining low contact resistance and ensuring rapid data transmission within the semiconductor device package.

Implementation Method 1

oxidation may adversely affect performance of the semiconductor device package

Methodology Applied
Scientific EffectOxidation prevention: Oxidation

Data Source

PatentUS11120988B2Semiconductor device packages and methods of manufacturing the same
Publication Date: 2021.09.14 ADVANCED SEMICON ENG INC
  • US11120988B2 patent drawing
  • US11120988B2 patent drawing
  • US11120988B2 patent drawing

AI summary

A semiconductor device package includes a first semiconductor device, a first redistribution layer (RDL) structure and a second RDL structure. The first semiconductor device has a first conductive terminal and a second conductive terminal. The first RDL structure covers the first conductive terminal. The second RDL structure covers the second conductive terminal and being separated from the first RDL structure.