Semiconductor Boundary Structure for PoP Bridging Prevention

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Solution Overview

Problem

The semiconductor industry faces challenges in manufacturing package on package (PoP) structures due to issues with parasitic capacitance, bridging, and increased size caused by the spacing and size of conductive pads, which affect the integration density and efficiency of electronic components.

Innovation Solution

Incorporating a boundary structure between conductive pads, made from non-conductive materials like polymers or silicon-based compounds, to prevent bridging and reduce parasitic capacitance, allowing for a smaller pad pitch and increased integration density without increasing the size of the semiconductor device.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the spacing and size of conductive pads are increased to prevent bridging, then manufacturing reliability improves, but the pad pitch increases causing increased device size and reduced integration density

Engineering Contradiction:
Improvemanufacturing reliabilityVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

A non-conductive boundary structure is introduced as an intermediary element between adjacent conductive pads. This boundary structure prevents direct contact (bridging) between pads during packaging while occupying minimal space, thereby maintaining small pad pitch and device size without compromising manufacturing reliability

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The boundary structure is implemented as a thin non-conductive film or layer that separates conductive pads. This thin film approach provides effective bridging prevention while minimizing the space required, allowing tight pad spacing and high integration density without increasing device footprint

Inventive Principle:
Principle #30Flexible shells and thin films

2Reliability

If the spacing between conductive pads is increased to reduce parasitic capacitance, then electrical performance improves, but the pad pitch increases causing reduced integration density

Engineering Contradiction:
Improveelectrical performanceVSAvoidintegration density
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The non-conductive boundary structure serves as a mediator between adjacent conductive pads, providing electrical isolation that reduces parasitic capacitance. This allows pads to be positioned closer together without compromising electrical performance, thereby maintaining high integration density

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The boundary structure applies non-conductive material specifically at critical interfaces between conductive pads where parasitic capacitance occurs. This localized approach reduces parasitic effects without requiring increased spacing across the entire device, preserving integration density

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If the boundary structure is added to prevent bridging, then manufacturing precision improves, but the device complexity increases

Engineering Contradiction:
Improvebridging preventionVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The boundary structure is implemented as a thin non-conductive film that can be deposited as a continuous layer across the device surface. This simple film-based approach provides effective bridging prevention without requiring complex multi-component structures, thereby maintaining manufacturing precision while minimizing device complexity

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The non-conductive boundary structure serves multiple functions simultaneously: it prevents bridging between pads, reduces parasitic capacitance, and provides a uniform base for subsequent packaging processes. This multi-functionality reduces the need for additional separate structures, thereby improving manufacturing precision without proportionally increasing device complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS10804234B2Semiconductor device having a boundary structure, a package on package structure, and a method of making
Publication Date: 2020.10.13 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10804234B2 patent drawing
  • US10804234B2 patent drawing
  • US10804234B2 patent drawing

AI summary

The present disclosure, in some embodiments, relates to a semiconductor structure. The semiconductor structure includes a substrate and a first conductive pad arranged over the substrate. A boundary structure is on an upper surface of the substrate around the first conductive pad. The boundary structure has one or more sidewalls defining an opening with a round shape over the first conductive pad.