Direct Contact Heating Element for Semiconductor Testing

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Solution Overview

Problem

Current semiconductor component testing methods face challenges with slow heating and cooling rates, limited dynamic testing capabilities, and inefficiencies in temperature control, particularly when testing discrete components, which hinders the ability to perform comprehensive functional tests across a wide temperature range.

Innovation Solution

A test device with a ceramic heating element that provides direct mechanical contact for rapid heating and integrated cooling, using a combined heating/cooling element with a coolant chamber for precise temperature control, allowing for quick and accurate temperature changes from -55°C to +260°C, enabling dynamic testing and minimizing unnecessary heating of surrounding components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If indirect heating methods (thermal radiation, hot air, flowing liquids) are used to heat semiconductor components, then the heating process can be carried out, but the heating rate is slow and uninvolved components are also heated

Engineering Contradiction:
Improveheating rateVSAvoidunnecessary heating of surrounding components
Core Design Contradiction:
SpeedVSLoss of energy

Solution Approach 1:

The heating system is segmented to target only the specific semiconductor component under test. The heating element is positioned and configured to deliver thermal energy locally to the component without heating surrounding areas, resolving the contradiction between achieving fast heating and avoiding unnecessary energy loss to surrounding components.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The heating element provides localized heating with high spatial precision. The thermal energy is concentrated exactly where needed (the semiconductor component) while surrounding components remain unaffected. This local quality approach enables rapid heating of the target component without the energy waste associated with heating the entire test environment.

Inventive Principle:
Principle #3Local quality

2Productivity

If furnace heating is used to test multiple components simultaneously, then批量 testing is achieved, but heating and cooling times are very long

Engineering Contradiction:
Improvenumber of components testedVSAvoidheating and cooling time
Core Design Contradiction:
ProductivityVSLoss of time

Solution Approach 1:

The test system employs dynamic temperature control with rapid heating and cooling capabilities. The heating element can quickly raise the temperature to test levels and just as quickly cool down, reducing the total test cycle time while maintaining the ability to test multiple components. This dynamic approach replaces the slow, static furnace heating process.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system replaces traditional mechanical furnace heating with a more rapid heating mechanism that can quickly transfer thermal energy to components. This substitution enables faster temperature changes while maintaining batch testing capability, significantly reducing the time penalty associated with conventional furnace methods.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If static burn-in tests with high voltage and high temperature are used, then quality assurance is achieved, but dynamic functional testing is not possible

Engineering Contradiction:
Improvequality assuranceVSAvoidtesting capability
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The test system is designed with multi-functionality to perform both static burn-in tests and dynamic functional tests. The same apparatus can apply high voltage and high temperature for reliability testing, or switch to applying test signals for dynamic functional evaluation. This universality resolves the contradiction by enabling both quality assurance and comprehensive functional testing within a single system.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system transitions from static testing conditions to dynamic testing capabilities. While maintaining the ability to perform traditional high-voltage, high-temperature burn-in tests for quality assurance, the system can now also apply time-varying test signals and perform dynamic functional evaluations, making the testing process adaptable to different test requirements.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables rapid and precise temperature control, allowing for efficient testing of semiconductor components across a wide temperature range, reducing testing time and enabling comprehensive functional testing of individual discrete chips, while minimizing thermal stress on adjacent components.

Implementation Method 1

very rapid heating of the component is possible through the inventive use of direct contact and associated thermal conduction between a specifically temperature-controlled contact surface and the component

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

The heating element is designed both for heating and for cooling the contact surface

Methodology Applied
Scientific EffectHeat transfer: Convection

Data Source

PatentEP3320352B1Testing discrete semiconductor components
Publication Date: 2019.09.18 EP ANTS
  • EP3320352B1 patent drawingFigure 1~2
  • EP3320352B1 patent drawingFigure 3~4
  • EP3320352B1 patent drawingFigure 5

AI summary

The invention relates to a testing device (6) for a discrete semiconductor component (1). The invention further relates to a method for testing a discrete semiconductor component (1). In order to simplify and improve the performance of tests of semiconductor components (1) in temperate environments, according to the invention a contact surface (14) of a heating element (8) of a thermal attachment (7) that can be placed on a test base (2) is placed, in a planar manner, against a semiconductor component (1) accommodated in the test base (2).