Semiconductor Current Direction Imaging via Phase Analysis
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Solution Overview
Problem
Existing methods for inspecting semiconductor devices do not effectively determine the direction of electric current flow, lacking a practical method to visualize or quantify this crucial parameter.
Innovation Solution
An image generating method and device that applies a stimulation signal to a semiconductor device, detects the resulting magnetism, and generates phase image data to determine the direction of the electric current flow, using color coding to visually represent the current direction and intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a magnetic detector is used to detect magnetism induced by electric current in a semiconductor device, then the sensitivity for distinguishing good and defective products is improved, but the ability to determine the direction of electric current flow is lost
Solution Approach 1:
The invention segments the detection process into two distinct components: intensity detection (amplitude of detection signal) and direction detection (phase difference between detection signal and reference signal). By separating these functions, the system can simultaneously achieve high sensitivity for defect detection while preserving directional information through phase analysis.
Solution Approach 2:
The invention introduces a reference signal as an intermediary element that is synchronized with the stimulation signal. This reference signal serves as a benchmark for comparing the phase of the detection signal, enabling the determination of electric current direction while maintaining the sensitivity of magnetic field detection.
2Ease of operation
If only the amplitude of the detection signal is analyzed, then the inspection process is simple, but the direction of electric current flow cannot be determined
Solution Approach 1:
The invention performs preliminary action by generating a reference signal that is synchronized with the stimulation signal before the actual detection and analysis process. This pre-prepared reference signal enables subsequent phase difference calculations to determine current direction without complicating the overall inspection workflow.
Solution Approach 2:
The invention changes the analysis parameter from only amplitude (intensity) to include both amplitude and phase difference. By incorporating phase difference as an additional parameter that can be extracted from the detection signal relative to the reference signal, the system gains directional information while maintaining operational simplicity.
3Loss of information
If phase difference analysis is performed between detection signal and reference signal, then the direction of electric current flow can be determined, but the device complexity increases
Solution Approach 1:
The invention makes the reference signal serve multiple functions: it acts as a synchronization reference for the detection system, a phase comparison benchmark for determining current direction, and a timing reference for coordinating the stimulation and detection processes. This multi-functionality reduces the need for separate systems for each purpose.
Solution Approach 2:
The invention implements feedback by using the phase difference between the detection signal and reference signal to provide information about electric current direction. This feedback mechanism allows the system to automatically determine and output directional information without requiring additional complex processing or interpretation steps.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the accurate visualization and quantification of electric current direction and intensity within semiconductor devices, facilitating better inspection and identification of defects.
Implementation Method 1
detecting a magnetism generated by the application of the stimulation signal and outputting a detection signal
Implementation Method 2
generating phase image data including a phase component which indicates a phase difference based on the phase difference between the detection signal and a reference signal
Data Source
AI summary
An image generating device is an apparatus for acquiring an image which shows a direction of an electric current flowing through a semiconductor device. The image generating device comprises a signal application unit configured to apply a stimulation signal to the semiconductor device, a magnetic detection unit configured to output a detection signal based on a magnetism generated by an application of the stimulation signal, and an image generation unit configured to generate phase image data comprising a phase component which indicates a phase difference based on the phase difference between the detection signal and a reference signal which is generated based on the stimulation signal and generate an electric current direction image which shows the direction of the electric current based on the phase image data.