Semiconductor Device with Dual-Modulus Resin for Stress Relief

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Semiconductor devices with stacked semiconductor chips face connection defects due to high elastic modulus mold resins, leading to cracks and peeling in the bump and electrode layers, which are exacerbated by thermal stress and bending.

Innovation Solution

A semiconductor device design featuring a bonding portion with a low elastic modulus between semiconductor elements and a resin portion with a higher elastic modulus, which alleviates stress and maintains a stable connection by using materials like acrylic resin for bonding and epoxy resin for sealing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If a mold resin with high elastic modulus is used for sealing, then the resin portion has sufficient structural strength, but connection defects occur in the bump and electrode layers due to stress concentration

Engineering Contradiction:
Improvestructural strength of resin portionVSAvoidconnection stability of bump and electrode layers
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The patent applies local quality by using a bonding portion with low elastic modulus specifically at the interface between semiconductor elements where stress concentration occurs, while using a different resin portion with high elastic modulus for sealing. This localized differentiation of material properties resolves the contradiction by providing both stress relief at critical interfaces and structural strength for sealing.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent uses composite materials by combining a bonding portion made of low elastic modulus material (acrylic resin) with a resin portion made of high elastic modulus material (epoxy resin). This composite structure allows the device to simultaneously achieve stress relief and structural strength, resolving the technical contradiction between these two opposing requirements.

Inventive Principle:
Principle #40Composite materials

2Device complexity

If a single material is used for both bonding and sealing, then the structure is simple, but it cannot simultaneously provide stress relief and structural strength

Engineering Contradiction:
Improvestructural simplicityVSAvoidconnection stability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The patent segments the sealing structure into two distinct portions: a bonding portion for stress relief and a resin portion for structural strength. This segmentation allows each portion to be optimized for its specific function, with the bonding portion using low elastic modulus material to prevent connection defects and the resin portion using high elastic modulus material for structural integrity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies local quality by assigning different material properties to different regions of the sealing structure. The bonding portion at the critical interface uses low elastic modulus material for stress relief, while the outer resin portion uses high elastic modulus material for structural strength, optimizing each region for its specific functional requirement.

Inventive Principle:
Principle #3Local quality

3Stability of the object's composition

If high elastic modulus resin is used, then packaging stability is improved, but thermal stress and bending are exacerbated causing connection defects

Engineering Contradiction:
Improvepackaging stabilityVSAvoidthermal stress and bending effects
Core Design Contradiction:
Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The patent applies parameter changes by varying the elastic modulus parameter across different portions of the sealing structure. The bonding portion uses low elastic modulus to reduce thermal stress and bending effects, while the resin portion uses high elastic modulus for packaging stability. This parameter differentiation resolves the contradiction between stability and stress resistance.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses composite materials with different elastic modulus characteristics to simultaneously achieve packaging stability and resistance to thermal stress. The combination of low elastic modulus bonding portion and high elastic modulus resin portion creates a composite structure that balances these opposing requirements.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively suppresses connection defects in the bump and enhances resistance to external stress, ensuring a stable electrical connection while minimizing package bending and thermal expansion-induced stress.

Implementation Method 1

The bonding portion is between the first semiconductor element and the second semiconductor element, bonds the first semiconductor element to the second semiconductor element, and has a first elastic modulus.

Methodology Applied
Scientific EffectAdhesive bonding: Adhesive

Implementation Method 2

The resin portion has a second elastic modulus higher than the first elastic modulus. A first portion of the resin portion is between the first semiconductor element and the second semiconductor element.

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Implementation Method 3

The bump is between the first semiconductor element and the second semiconductor element and electrically connects the first semiconductor element and the second semiconductor element.

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 4

The resin portion has a second elastic modulus higher than the first elastic modulus. A third portion of the resin portion is overlapped with the first semiconductor element and the second semiconductor element in a second direction intersecting with a first direction going from the wiring substrate toward the first semiconductor element.

Methodology Applied
Scientific EffectElastic modulus differential: Elasticity

Data Source

PatentUS9997484B2Semiconductor device and manufacturing method of the same
Publication Date: 2018.06.12 KIOXIA CORP
  • US9997484B2 patent drawing
  • US9997484B2 patent drawing
  • US9997484B2 patent drawing

AI summary

A semiconductor device includes a wiring substrate, a first semiconductor element, a second semiconductor element, a bump, a bonding portion, and a resin portion. The second semiconductor element is between the wiring substrate and the first semiconductor element. The bump is between the first and second semiconductor elements and electrically connects the first and second semiconductor elements. The bonding portion is between the first and second semiconductor elements, bonds the first semiconductor element to the second semiconductor element, and has a first elastic modulus. The resin portion has a second elastic modulus higher than the first elastic modulus. The resin portion is between the first and second semiconductor elements. The first semiconductor element is between a second portion of the resin portion and the wiring substrate. A third portion of the resin portion is overlapped with the first and second semiconductor elements.