Semiconductor Emission Inspection Using a Linear IR Filter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing methods for analyzing semiconductor apparatus failures using infrared light detection provide low wavelength resolution and complicate the process with band filter changes, and struggle to accurately distinguish between different types of emitted light such as leaked and switching light.
Innovation Solution
An inspection apparatus and method using an optical filter with a linearly varying transmittance characteristic to transmit or reflect emitted light, capturing both transmitted and reflected light to derive wavelength information through image data analysis without filter changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a band filter is used to capture emitted infrared light, then the filtering process is simple, but the wavelength resolution is low and the process becomes complicated due to filter wheel changes
Solution Approach 1:
The patent extracts the wavelength selection function from the mechanical filter wheel system and implements it through optical properties of tilted filters. By removing the moving parts and complex switching mechanism, the system achieves wavelength resolution improvement while reducing device complexity.
Solution Approach 2:
The patent replaces the mechanical filter wheel system with an optical-based wavelength selection mechanism using tilted filters. This substitution eliminates moving parts and mechanical complexity while maintaining or improving wavelength resolution through optical interference effects.
2Measurement precision
If spectroscopic spectrum is acquired as an image along with emitted infrared light image, then the imaging process is integrated, but the wavelength accuracy is low and images may overlap
Solution Approach 1:
The patent segments the optical path into separate channels: one for capturing the emitted infrared light image and another for capturing the spectroscopic spectrum. This segmentation prevents image overlap and improves wavelength accuracy by dedicating specific optical paths to specific measurement functions.
3Adaptability or versatility
If multiple band filters are changed to analyze different wavelength characteristics, then the wavelength range coverage is improved, but the inspection process time increases
Solution Approach 1:
The patent uses tilted filters with specific inclination angles that enable periodic wavelength selection. By adjusting the tilt angle, different wavelength ranges can be selected without mechanical filter changes, maintaining versatility while improving inspection speed through a static, rapidly switchable optical system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient acquisition of wavelength information about emitted light from semiconductor apparatuses, eliminating the need for filter changes and improving resolution.
Implementation Method 1
an optical filter having a transmission characteristic in which transmittance varies linearly in a predetermined wavelength range and configured to transmit or reflect emitted light generated from the semiconductor apparatus on the basis of the transmission characteristic
Implementation Method 2
an imaging unit configured to capture the light transmitted or reflected by the optical filter to output first image data and capture light as emitted light that has arrived without passing through the optical filter to output second image data
Data Source
Figure 1
Figure 2
Figure 3
AI summary
An inspection apparatus for inspecting a semiconductor apparatus includes a stage configured to hold the semiconductor apparatus, an LRG filter having a transmission characteristic in which transmittance varies linearly in a predetermined wavelength range and configured to transmit or reflect emitted light generated from the semiconductor apparatus on the basis of the transmission characteristic, an infrared camera configured to capture the light transmitted through the LRG filter to output a transmission image and capture light as emitted light that has arrived without passing through the LRG filter to output a total light amount image, and a computer configured to derive wavelength information about the emitted light on the basis of the transmission image and the total light amount image.