Semiconductor Inspection Remote Console Event Data Separation
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Solution Overview
Problem
Current semiconductor inspection apparatuses face issues with network bandwidth consumption due to the transfer of bitmap information for screen updates, leading to color blurs and increased data loads, and struggle to analyze operator operations effectively from log data.
Innovation Solution
The apparatus communicates event information at a widget level for operation screens and separates image information compression, allowing only necessary image parts to be transmitted based on the semiconductor inspection state, and logs operator events for improved analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of information
If bitmap information is used for screen update communication, then complete screen information is transmitted, but network bandwidth consumption increases and data transfer load increases
Solution Approach 1:
The patent extracts and transmits only the essential event information (mouse movements, key presses, window operations) from the complete screen update data, separating critical interaction data from redundant visual information to reduce network bandwidth consumption while maintaining operational functionality
Solution Approach 2:
The patent segments screen update communication into discrete event types (mouse events, keyboard events, window management events), allowing selective transmission of specific event categories based on current operational needs, thereby reducing overall data transfer volume
2Loss of information
If all image information is transmitted, then complete image data is available, but network traffic increases and transmission time increases
Solution Approach 1:
The patent applies different transmission qualities to different regions of the image data, prioritizing transmission of areas containing operational events or changes while reducing or omitting transmission of static or less important regions, thereby optimizing network traffic based on local information value
Solution Approach 2:
The patent transmits only the partial image information necessary for current operational context rather than complete image data, sending sufficient information for task completion without excessive data transfer
3Quantity of substance
If compression is applied to reduce data size, then network bandwidth consumption decreases, but image quality deteriorates and color accuracy is lost
Solution Approach 1:
The patent segments image data into event-related and non-event-related portions, applying compression selectively to non-critical areas while maintaining higher fidelity for regions containing operational information, thus balancing data size reduction with quality preservation
4Measurement precision
If operator operation logs are stored in detail, then analysis accuracy improves, but log data volume increases and analysis complexity increases
Solution Approach 1:
The patent extracts and logs only the essential operational events (clicks, keystrokes, window operations) rather than complete screen state information, removing redundant data while preserving the core information needed for operator behavior analysis
Data Source
AI summary
An inspected image can be communicated without putting large load on a network. A remote console enables an operation screen and a moving image to be displayed and processed without color shifts. Information on the operation screen is not communicated as bitmap information, but event information such as a formation of a window and the moving of a mouse is communicated as information at a level of I parts of graphical user interface. Moreover, communication of the event information on the operation screen and communication of a moving image are separated. In addition, a method of compressing information on the operation screen and a method of compressing information on the moving image are separated. A necessary part of information on the moving image is selected and communicated depending on the state of the semiconductor inspection apparatus, an operation of an operator, and a pattern to be inspected.