Semiconductor Light-Receiving Device Electric Field Constriction

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Solution Overview

Problem

Back-side illuminated semiconductor light-receiving devices face challenges in achieving high-speed response due to increased parasitic capacitance and leakage currents caused by concentrated electric fields at the corners of the etched n-type conductive layer, which deteriorate the device's performance.

Innovation Solution

A semiconductor light-receiving device is designed with a p-type conductive layer on the substrate side, featuring a p-type conductive region in the n-type window layer that does not reach the multiplication layer or any external power-supplied electrode, reducing electric field intensity and leakage currents by constraining the electric field to the lower part of the n-type conductive layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the n-type conductive layer is etched to constrict the electric field, then the electric field is concentrated at the corner portions, but this causes leakage current and device deterioration

Engineering Contradiction:
Improvedevice durabilityVSAvoidleakage current
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A p-type conductive region is introduced as an intermediary element between the etched n-type conductive layer and the multiplication layer. This p-type region serves as a mediator that redistributes the electric field, preventing direct concentration at the corner portions of the etched structure while maintaining the electric field constriction effect in the active region.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The p-type conductive region is selectively formed only in specific areas where electric field concentration occurs at the corner portions, creating local quality variation. This allows the electric field to be constrained in the central active region while being redistributed in the peripheral corner regions, preventing leakage current without compromising overall device performance.

Inventive Principle:
Principle #3Local quality

2Speed

If the thickness of the n-type window layer is increased to reduce parasitic capacitance, then high-speed response is improved, but the electric field intensity at corner portions increases

Engineering Contradiction:
Improveresponse speedVSAvoidelectric field concentration
Core Design Contradiction:
SpeedVSObject-affected harmful factors

Solution Approach 1:

The p-type conductive region acts as an intermediary that decouples the relationship between window layer thickness and corner electric field intensity. By introducing this intermediate structure, the device can achieve high-speed response through increased window layer thickness without suffering from excessive electric field concentration at the corners.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If the PN junction size is increased to improve mountability and light alignment, then ease of manufacture is improved, but the device capacity increases and time constant increases

Engineering Contradiction:
ImprovemountabilityVSAvoidresponse time
Core Design Contradiction:
Ease of manufactureVSLoss of time

Solution Approach 1:

The device structure is segmented into distinct functional regions: a central active region with constrained electric field for high-speed response, and peripheral regions with p-type conductive structures for electric field redistribution. This segmentation allows the PN junction to be sized for ease of manufacture while maintaining high-speed response characteristics in the critical active region.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances high-speed response and reduces device deterioration by distributing the electric field vertically and reducing the intensity at the corners, allowing for a thicker n-type window layer without compromising performance.

Implementation Method 1

a multiplication layer producing avalanche multiplication

Methodology Applied
Scientific EffectAvalanche multiplication: Avalanche Breakdown

Implementation Method 2

obtaining this electric field constriction effect requires a reduction in the thickness of the layer in the lower part of the etched n-type conductive layer

Methodology Applied
Scientific EffectElectric field constriction: Electric Field

Implementation Method 3

a light absorption layer having a smaller bandgap than that of incident light

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS9406830B1Semiconductor light-receiving device
Publication Date: 2016.08.02 MITSUBISHI ELECTRIC CORP
  • US9406830B1 patent drawing
  • US9406830B1 patent drawing
  • US9406830B1 patent drawing

AI summary

A semiconductor light-receiving device includes: a substrate; a p-type conductive layer, a light absorption layer having a smaller bandgap than that of incident light, a multiplication layer producing avalanche multiplication, and an n-type window layer laminated in that order on the substrate; an n-type conductive layer in a region of part of the n-type window layer; and a first p-type conductive region in a region of the n-type window layer that is not in contact with the n-type conductive layer, wherein the first p-type conductive region does not reach the multiplication layer and is not in contact with any electrode to which power is supplied from outside.