Semiconductor Measurement Monochromator for Polarization-Independent Scanning

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Solution Overview

Problem

Existing semiconductor measurement systems face challenges with wavelength and polarization dependence, leading to increased polarization dependence of diffraction efficiency and additional time delays due to grating switching in broadband monochromators, which affect measurement throughput and accuracy.

Innovation Solution

A semiconductor measurement system incorporating a monochromator with a wavelength control device, polarization optics, and a multi-grating mount that separates and combines light beams into orthogonal polarization paths, eliminating polarization dependence and enabling continuous wavelength scanning without grating replacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a broadband monochromator is used to measure across multiple wavelengths, then measurement coverage is improved, but polarization dependence of diffraction efficiency increases

Engineering Contradiction:

Improvemeasurement coverageVSAvoidpolarization dependence

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The broadband spectrum is divided into multiple wavelength bands, with each band handled by a dedicated diffraction grating optimized for its specific range. This segmentation allows each grating to operate at optimal polarization conditions while collectively covering the full broadband spectrum, thereby reducing overall polarization dependence.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different diffraction gratings with varying parameters (groove densities, blaze angles) are selected for different wavelength bands. By matching grating parameters to specific wavelength ranges, the system optimizes diffraction efficiency for each band while minimizing polarization effects across the entire spectrum.

Inventive Principle:

Principle #35Parameter changes

2Adaptability or versatility

If grating switching is implemented to cover different wavelength ranges, then measurement versatility is improved, but time delays are introduced

Engineering Contradiction:

Improvewavelength range coverageVSAvoidgrating switching delay

Core Design Contradiction:

Adaptability or versatilityVSLoss of time

Solution Approach 1:

Multiple diffraction gratings are pre-positioned in the optical path at their optimal locations before measurement begins. This preliminary arrangement eliminates the need for time-consuming grating switching during actual measurements, as the system can directly access any wavelength band by activating the corresponding pre-positioned grating.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The system maintains continuous measurement capability across all wavelength bands by having all gratings simultaneously available in the optical path. This eliminates interruptions and delays associated with sequential grating switching, enabling continuous spectral analysis without action pauses.

Inventive Principle:

Principle #20Continuity of useful action

3Measurement precision

If multiple diffraction gratings are used to reduce polarization dependence, then measurement accuracy is improved, but device complexity increases

Engineering Contradiction:

Improvemeasurement accuracyVSAvoidsystem structure

Core Design Contradiction:

Measurement precisionVSDevice complexity

Solution Approach 1:

A single optical platform is designed to accommodate multiple diffraction gratings, allowing the same basic optical path and detection system to handle all wavelength bands. This universal design minimizes additional complexity by reusing existing optical components while only adding the necessary gratings and selection mechanism.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system achieves reduced polarization dependence, increased measurement throughput, and efficient wavelength scanning by optimizing polarization and grating efficiency, allowing for precise semiconductor measurements across a wide wavelength range without additional time delays.

Implementation Method 1

a multi-grating mount having a plurality of diffraction gratings respectively corresponding to the plurality of wavelength bands, the plurality of diffraction gratings being configured to diffract the collimated beams having the matched polarization direction

Methodology Applied

Scientific EffectDiffraction: Diffraction

Implementation Method 2

polarization optics configured to separate each of the collimated beams into orthogonal polarization beams, match polarization directions of the separated polarization beams

Methodology Applied

Scientific EffectPolarization: Polarisation

Data Source

PatentUS20250264324A1Semiconductor measurement system having monochromator and operating method thereof

Publication Date: 2025.08.21 SAMSUNG ELECTRONICS CO LTD

AI summary

Provided is a semiconductor measurement system including a laser configured to output a light having multiple wavelengths, a broadband spectrometer configured to receive the light and output monochromatic light having a single wavelength, a measurement device configured to obtain physical information of a sample based on the monochromatic light, and a computing device configured to inspect or measure the sample based on the obtained physical information, wherein the broadband spectrometer is further configured to remove polarization dependence of the light based on a wavelength and a polarization separating/combining device.