Semiconductor Memory Device with Low Leakage Transistor for High Density

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Solution Overview

Problem

Conventional semiconductor memory devices face limitations in data retention time, integration density, and the number of write cycles, with DRAM losing data when power is off, SRAM having low integration, and FGNVMs requiring high voltage for writing and suffering from interference between memory cells.

Innovation Solution

A semiconductor memory device structure utilizing a writing transistor with low leakage current, a reading transistor for high-speed operation, and a capacitor with specific dielectric materials, arranged in a matrix with optimized wiring configurations to reduce voltage requirements and increase integration density, allowing for long data retention and high write cycle counts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of stationary object

If a conventional FGNVM structure is used to achieve non-volatile storage, then data retention time is improved (one year or longer), but the number of write cycles is limited (one hundred thousand or less) and high voltage is required causing gate insulating film deterioration

Engineering Contradiction:
Improvedata retention timeVSAvoidnumber of write cycles
Core Design Contradiction:
Duration of action of stationary objectVSReliability

Solution Approach 1:

The patent changes the fundamental operating parameters by using a transistor with extremely low leakage current (1×10^-21 A or less) instead of conventional transistors, enabling data retention without high voltage charge injection. This parameter change allows achieving non-volatile storage characteristics with unlimited write cycles by avoiding gate insulating film deterioration.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the high voltage charge injection mechanism of FGNVM with a low voltage transistor switching mechanism. By substituting the charge storage mechanism with a leakage-free transistor off-state, the system achieves non-volatile storage without the mechanical stress and film deterioration caused by high voltage operations.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Duration of action of stationary object

If FGNVM is used to achieve non-volatile storage, then data retention is improved, but integration density deteriorates due to interference between adjacent memory cells requiring larger cell area

Engineering Contradiction:
Improvedata retention timeVSAvoidmemory cell area
Core Design Contradiction:
Duration of action of stationary objectVSArea of stationary object

Solution Approach 1:

The patent changes the retention mechanism from high voltage charge storage in floating gates to low leakage current transistor switching. This parameter change reduces the memory cell area by eliminating the need for large floating gate structures and reducing interference effects, achieving both non-volatile storage and high integration density.

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If DRAM structure is used to achieve high integration density, then area per memory cell is reduced (8 F^2), but data retention deteriorates (data lost within several tens of seconds requiring frequent refresh)

Engineering Contradiction:
Improvememory cell areaVSAvoiddata retention time
Core Design Contradiction:
Area of stationary objectVSDuration of action of stationary object

Solution Approach 1:

The patent changes the retention mechanism from capacitor charge storage (DRAM) to transistor leakage current suppression. By using a transistor with leakage current of 1×10^-21 A or less, the system achieves both high integration density (small cell area) and long data retention (one hour or longer) without frequent refresh operations.

Inventive Principle:
Principle #35Parameter changes

4Speed

If SRAM structure is used to achieve fast data access, then data retention is improved during power supply, but integration density deteriorates (100 F^2 per memory cell) and data is lost when power is not supplied

Engineering Contradiction:
Improvedata access speedVSAvoidmemory cell area
Core Design Contradiction:
SpeedVSArea of stationary object

Solution Approach 1:

The patent changes the retention mechanism from active power supply dependence (SRAM) to passive leakage suppression. By using a transistor with extremely low leakage current, the system achieves non-volatile storage with fast access speeds and small cell area, eliminating the need for continuous power supply while maintaining data integrity.

Inventive Principle:
Principle #35Parameter changes

5Ease of manufacture

If conventional memory structures are used, then manufacturing is simplified, but power consumption increases due to frequent refresh operations or high voltage requirements

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidpower consumption
Core Design Contradiction:
Ease of manufactureVSUse of energy by moving object

Solution Approach 1:

The patent changes the operating parameters to use low voltage (avoiding high voltage charge injection) and eliminates frequent refresh operations (by using leakage-free transistor). This parameter change reduces power consumption while maintaining manufacturing simplicity through conventional transistor fabrication processes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables data retention for one hour or longer, supports one million or more write cycles, and achieves an integration density of 40 F^2 or less, reducing power consumption and eliminating the need for high voltage writing, thus overcoming the limitations of existing technologies.

Implementation Method 1

even when a transistor used for switching is in an off state, a slight amount of leakage current is generated between a source and a drain

Methodology Applied
Scientific EffectLeakage current: Electrical Resistance

Implementation Method 2

data is stored by holding charge in a capacitor which is provided in a memory cell

Methodology Applied
Scientific EffectCharge storage: Capacitance

Implementation Method 3

a so-called floating gate is provided between a channel and a gate and charge is stored in the floating gate, whereby data is held

Methodology Applied
Scientific EffectCharge storage in floating gate: Capacitance

Data Source

PatentUS8395931B2Semiconductor memory device and driving method thereof
Publication Date: 2013.03.12 SEMICON ENERGY LAB CO LTD
  • US8395931B2 patent drawing
  • US8395931B2 patent drawing
  • US8395931B2 patent drawing

AI summary

A semiconductor device which stores data by using a transistor whose leakage current between source and drain in an off state is small as a writing transistor. In a matrix including a plurality of memory cells in which a drain of the writing transistor is connected to a gate of a reading transistor and the drain of the writing transistor is connected to one electrode of a capacitor, a gate of the writing transistor is connected to a writing word line; a source of the writing transistor is connected to a writing bit line; and a source and a drain of the reading transistor are connected to a reading bit line and a bias line. In order to reduce the number of wirings, the writing bit line or the bias line is substituted for the reading bit line in another column.